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Flap transfer valve having valve cover

A technology for conveying valves and substrates, applied in the direction of conveyor objects, lifting valves, valve devices, etc., can solve problems such as processing room pollution, and achieve the effect of simple maintenance and replacement

Active Publication Date: 2011-08-10
VAT HLDG AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In some cases, certain treatments lead to severe contamination of the interior of the treatment chamber

Method used

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  • Flap transfer valve having valve cover
  • Flap transfer valve having valve cover
  • Flap transfer valve having valve cover

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0068] Figures 1 to 8c The same schematic embodiment of a flap delivery valve according to the invention is shown in a different state, from a different perspective, and in a different level of detail. These figures will therefore be described together, and reference numerals and features already explained in the preceding figures will not be repeated in some cases.

[0069] A flapper transfer valve for transferring semiconductor components or substrates to a semiconductor or substrate process chamber capable of being isolated in an airtight manner has an airtight valve housing 14 substantially in the shape of a cuboid comprising Four thin rectangles and two smaller rectangles that are actually square. Two opposing elongated side surfaces form a first opening surface 15 and a second opening surface 16 of the valve housing 14 . The lower elongated surface is marked as side wall 18 in the figure, as Figure 4 shown. An elongated, slit-shaped first opening 1 is formed on a f...

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PUM

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Abstract

A flap transfer valve having a valve cover is disclosed. An elongated first opening can be closed by an elongated valve closure beam between a closed position and an open position. A shaft can be rotated about a shaft axis by a drive and is operatively connected to the valve closure beam to cause the valve closure beam to pivot. The valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing. The shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis. A first arm is arranged on the shaft to apply the force to the back side of the valve closure beam so as to facilitate pivotably closing the beam.

Description

technical field [0001] The invention relates to a flap transfer valve according to the preamble of claim 1 for transferring semiconductor components or substrates to a semiconductor or substrate process which can be isolated in a gas-tight manner in the processing room. Background technique [0002] Such a flap delivery valve is known from EP 0554522. [0003] Vacuum valves of all kinds are used in particular in the field of integrated circuit and semiconductor manufacturing, which must be carried out in a protected environment free of contaminating particles as far as possible. For example, in a manufacturing facility for manufacturing semiconductor wafers or liquid crystal substrates, highly sensitive semiconductor elements or liquid crystal elements sequentially pass through a plurality of processing chambers, wherein the semiconductor elements located in the processing chambers are each processed by a processing device. During processing in the processing chamber and d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K1/20F16K51/02H01L21/677H01L21/683
CPCF16K51/02F16K1/2007F16K1/2028H01L21/67126F16K1/205F16K1/20
Inventor 弗里德里克·盖泽
Owner VAT HLDG AG