Mode converter having multi-layer structure and optical branching device
A technology of mode conversion and multi-layer structure, which is applied in the direction of light guides, optics, instruments, etc., can solve the problems of unstable transmission direction of light field, low coupling efficiency of optical fiber and waveguide, etc., to reduce size, improve stability, and improve coupling efficiency effect
Active Publication Date: 2012-10-10
SHANGHAI SILIGHT TECH
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Problems solved by technology
The single-channel mode converter 2 consists of two layers of ridge waveguides, and the coupling efficiency between the fiber and the waveguides is not high
The lateral free propagation region 3 is formed by deep etching, and there is a lateral profile limitation, and the sudden change in thickness makes the light field unstable in the direction of transmission
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[0021] Below by specific embodiment and in conjunction with accompanying drawing, the present invention is described in detail:
[0022] figure 2 The mode converter in the embodiment of the present invention is given, taking a three-layer ridge waveguide as an example. The ridge waveguide 5 and the slab waveguide 6 are formed by deep etching on the silicon wafer, wherein the input end 50 of the ridge waveguide 5 is a single ridge waveguide located on the slab waveguide 6 formed by deep etching, and then formed by multiple etchings from deep to Shallow 3 ridge waveguide layers 51 , 52 , 53 . The specific process may be: perform deep etching on the ridge waveguide 5 to form the ridge waveguide layer 51, then perform medium-depth etching on the ridge waveguide layer 51 to form the ridge waveguide layer 52, and finally perform shallow etching on the ridge waveguide layer 52 to form the ridge waveguide Layer 53. In this mode converter, the width of the ridge waveguide layers 51...
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The invention discloses a mode converter having a multi-layer structure and an optical branching device. The mode converter comprises flat waveguides and at least three layers of ridge waveguides which are arranged on the flat waveguide, wherein the width of each layer of ridge waveguides is gradually decreased from an input end to an output end; when the width is decreased to a certain value, the layer of ridge waveguides is cut off, namely one layer of the at least three layers of ridge waveguides is reduced, so that the height of the ridge waveguides is reduced gradually; the input end is farther away from a cut-off position of the ridge waveguides of the optical flat waveguides; and the output end of the mode converter consists of the single-layer flat waveguides and the single-layer ridge waveguides. A transverse free propagation area of the optical branching device consists of the flat waveguides without transverse limitation. Compared with the prior art, a technology provided by the invention has the advantages that: the efficiency of coupling from optical fibres to an optical device can be improved, a one-step etching process is reduced, and the stability of mode transmission in the optical device is improved at the same time.
Description
technical field [0001] The invention relates to an integrated optoelectronic device, in particular to a mode converter and an optical splitter. Background technique [0002] Optical waveguides and planar optical integrated circuit PLCs based on silicon SOI on insulating substrates can help reduce the cost of optical chips and realize multifunctional monolithic integration. However, in planar optical integrated circuits based on SOI or other high-material refractive index contrast, the scattering loss at branch nodes is an obstacle to construct low-loss devices. [0003] Invention patent 200810092207.0 discloses an SOI optical splitter based on a parallel mode converter, see figure 1 . The optical splitter is composed of an incident coupling optical waveguide 1, a single-channel mode converter 2, a transverse free propagation region 3 and a mode converter 4 connected in sequence. The single-channel mode converter 2 is composed of two layers of ridge waveguides, and the cou...
Claims
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IPC IPC(8): G02B6/14G02B6/122
Inventor 李冰杨晶洪小刚
Owner SHANGHAI SILIGHT TECH