Five-axis optical aspheric surface detection device driven by linear motor

Abstract

The invention relates to a five-axis optical aspheric surface detection device driven by a linear motor, in particular relating to a surface-shaped detection device of an optical aspheric surface component. The five-axis optical aspheric surface detection device provided by the invention comprises X/Y/Z-axis linear motors, X/Y/Z-axis linear guide rails, a base, X/Y/Z-axis workbenches, a strut, a cross beam, A/C-axis workbenches, a measuring head fixed base, a measuring head and A/C-axis DD (direct drive)motors, wherein the X/Y/Z-axis workbenches are driven by the X/Y/Z-axis linear motors; the X-axis workbench is positioned on the base; the A-axis workbench is driven by the A-axis DD motor; the C-axis workbench is driven by the C-axis DD motor; the C-axis DD motor is positioned on the X-axis workbench; the C-axis DD motor can move back and forth along with the X-axis workbench; the Z-axis workbench is positioned on the Y-axis workbench; the A-axis DD motor is positioned on the Z-axis workbench; and the A-axis DD motor can move left and right or up and down along with the Y-axis workbench and the Z-axis workbench. The five-axis optical aspheric surface detection device provided by the invention can adjust the relative position of the measuring head and the surface of a workpiece through the linkage of five axes so as to ensure the measuring head to be perpendicular to the surface of the workpiece.

Description

technical field [0001] The invention relates to a surface shape detection device of an optical aspheric element, in particular to a five-axis optical aspheric surface detection device driven by a linear motor for different curvatures. Background technique [0002] Aspherical optical elements have many advantages in application, such as correcting the aberration of high-resolution lenses, thereby improving the imaging quality of the optical system, and one or several aspheric elements can replace multiple spherical elements, thereby simplifying the structure of the instrument and reducing the cost and effectively reduce the mass of the instrument. (Refer to literature: Zhang Yunqing. Growing demands and process challenges. Opto-Mechanical Information, 2005, 11: 14-21). Especially in recent years, the emergence of new materials and the development of new manufacturing technologies have led to rapid development of aspheric processing technology. Now, some new processes such as...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the existing detection platform cannot adjust the measuring head and the workpiece surface to a vertical position when measuring aspheric optical elements, and cannot realize accurate measurement of aspheric optical elements. The linkage adjusts the relative position between the probe and the surface of the workpiece to ensure that the probe is perpendicular to the surface of the workpiece. A five-axis optical aspheric surface detection device driven by a linear motor

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