Electrochemical sensor chip with digital microfluidic technology
A digital microfluidic and electrochemical technology, applied in scientific instruments, instruments, material analysis by electromagnetic means, etc., can solve problems such as the limitation of the sensitivity of the detection system, and achieve the effect of increasing the detection sensitivity
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[0022] The following is based on figure 1 — image 3 A preferred embodiment of the present invention is given and described in detail in order to better illustrate the present invention but not to limit the scope of the present invention.
[0023] according to figure 1 Shown, the concrete implementation step of the present invention is as follows:
[0024] Droplet Control Unit:
[0025] 1) Preparation of substrate 1
[0026] The substrate 1 can be any material, including a flexible substrate. If the substrate is a conductive material, an insulating layer 2 should be deposited first, and the process of depositing the insulating layer can be thermal oxidation, chemical vapor deposition CVD or physical vapor deposition PVD and other processes. For example, if the substrate is made of silicon, an insulating layer of silicon dioxide can be used.
[0027] 2) Deposition and patterning of the electrode layer 3 .
[0028] The electrode 3 can be metal, conductive polymer or condu...
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