Moveable reflector laser collimator, moveable reflector target surface sensor and laser collimating method thereof

A technology of laser aiming and mirrors, which is applied in optics, instruments, telescopes, etc., can solve problems such as the inability to accurately obtain spatial information such as the angle of laser incidence, the balance of accuracy and efficiency of target surface sensors, and the inability to optimize laser energy distribution. Achieve the effects of solving multi-target feedback image aliasing, saving aiming time, and solving spot aliasing

Inactive Publication Date: 2011-09-21
INST OF AUTOMATION CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As a result, the adjustment time is extended in order to improve the aiming accuracy, and the extended time intensifies the impact of equipment drift on the accuracy, resulting in the entire beam-target coupling process taking care of one and losing the other, forming a vicious circle
[0004] Therefore, in terms of beam-target coupling, it has been difficult for traditional target surface sensors to achieve a balance bet

Method used

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  • Moveable reflector laser collimator, moveable reflector target surface sensor and laser collimating method thereof
  • Moveable reflector laser collimator, moveable reflector target surface sensor and laser collimating method thereof
  • Moveable reflector laser collimator, moveable reflector target surface sensor and laser collimating method thereof

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no. 1 approach

[0048] The structure and principle of the moving mirror laser sighting device of the present invention are described below.

[0049] figure 2 It shows a schematic structural diagram of a laser sighting device with a moving mirror according to the first embodiment of the present invention.

[0050] Such as figure 2 As shown, the moving mirror laser sighting device includes a target O, multiple laser beams emitted by multiple lasers irradiate the target target, the image acquisition device is used to collect the light incident on it to form an image, and the lens is set at Between the target and the image acquisition device, the image of the target is transmitted to the image acquisition device. In particular, it also includes a moving mirror, which is arranged between the target and the image acquisition device, and reflects multiple laser beams emitted by the multiple lasers onto the image acquisition device to form a light spot, and The moving mirror can move linearly relative ...

no. 2 approach

[0057] The following describes the moving mirror target surface sensor of the present invention. image 3 It is a schematic diagram of the three-dimensional structure of the moving mirror target surface sensor of the present invention. Figure 4 It is a front view of the structure of the moving mirror target surface sensor of the present invention. Figure 5 It is the left side view of the structure of the moving mirror target surface sensor of the present invention.

[0058] Such as image 3 , Figure 4 , Figure 5 As shown, the moving mirror target surface sensor of the present invention includes a first laser aiming device (located on the left in the figure), a second laser aiming device (located on the right in the figure), a central vision detection system, a differential focusing system, and Moving mirror servo drive system. Wherein, the first laser aiming device and the second laser aiming device both adopt laser aiming devices with the same structure and are arranged symme...

no. 3 approach

[0090] The working principle of the moving mirror laser sighting device of the present invention is described below.

[0091]

[0092] Figure 8 It is a schematic diagram of the relationship between the movement of the moving mirror and the track of the reflected laser spot.

[0093] Such as Figure 8 As shown, the laser is incident from point ①, reflected by the mirror, and imaged on the CCD. The imaging result on the CCD is displayed in a plan view above the CCD. When the mirror moves in the vertical arrow direction (that is, toward the CCD direction), its imaging point on the CCD moves in the horizontal arrow direction (on the CCD image sensitive surface). Specifically, when the mirror is in the conjugate position, the incident laser is reflected at point ②, and a spot is formed at point ② on the CCD image-sensitive surface; when the mirror moves to the CCD direction to position I, the incident laser is reflected at point ③ , And form a light spot at point ③ on the CCD image-se...

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Abstract

The invention relates to a moveable reflector laser collimator, a moveable reflector target surface sensor and a laser collimating method thereof. The moveable reflector laser collimator comprises an image acquisition device, a moveable reflector and a lens, wherein the image acquisition device is used for acquiring incident rays to form an image; the moveable reflector is used for reflecting thelaser onto the image acquisition device to form a light spot; the lens is used for transmitting a target to the image acquisition device; and the moveable reflector can move linearly relative to the image acquisition device. By providing a moveable reflector system, the small-range high-precision translation of the moveable reflector is implemented, so that the target can be quickly and accurately collimated by the laser, thereby solving the phenomenon of light spot aliasing, saving the collimating time and enhancing the targeting precision.

Description

Technical field [0001] The invention relates to a device for aiming multiple laser beams, in particular to a moving mirror laser aiming device, a moving mirror target surface sensor and a laser aiming method thereof. Background technique [0002] The technology of guiding multiple laser beams for precise aiming can be applied to the high-end manufacturing and inspection industry, and can also be used for other special application fields that guide the aiming of multiple laser beams on small targets. In the above application, it is necessary to use a dedicated laser aiming device to simultaneously guide hundreds of laser beams to a designated target area of ​​a few millimeters, and then hundreds of laser beams ablate the target. Generally, the process of guiding the laser to aim at the target is simply referred to as the beam-target coupling process, and the special sensor formed by this laser aiming device for guiding multiple lasers at the target is called the target surface sen...

Claims

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Application Information

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IPC IPC(8): G02B23/12G02B26/08
Inventor 吴保林张文生史亚莉郝银星李海鹏董秋雷王颢星张正涛
Owner INST OF AUTOMATION CHINESE ACAD OF SCI
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