Resonator element and resonator
A vibrating plate and vibrator technology, applied in power oscillators, piezoelectric devices/electrostrictive devices, material selection for piezoelectric devices or electrostrictive devices, etc., can solve problems such as Q value degradation
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Embodiment approach 1
[0046] figure 1 It is a plan view showing the schematic structure of the vibrating piece of Embodiment 1, figure 2 (a) is to show figure 1 A cross-sectional view of the A-A section, figure 2 (b) is shown enlarged figure 1 A partial floor plan of Part B. First, refer to figure 1 A schematic structure of the vibrating element will be described. The vibrating piece 10 is developed on a plane composed of an X axis and a Y axis perpendicular to the X axis, and the Z axis represents the thickness.
[0047]The material of the vibrating piece 10 of this embodiment is not particularly limited, and may be quartz, a piezoelectric material other than quartz, or other materials. In the case of quartz, the X axis is the electrical axis and the Y axis is the mechanical axis. The vibrator is cut out from a single crystal of quartz so that the optical axis and the Z axis are the optical axes.
[0048] In addition, although the vibrating piece 10 of this embodiment exemplifies a resona...
no. 1 Embodiment
[0060] First, refer to Figure 4 pairs such that Q / Q 0 The range of 11 or more will be described.
[0061] Figure 4 is shown such that Q / Q 0 It is a graph showing the relationship between the tapered length occupancy η (horizontal axis) and the tapered width occupancy ξ (vertical axis) of 1.1 or more. Here, for the taper length occupancy η and taper width occupancy ξ used, from the above image 3 is extracted such that Q / Q 0 It is in the range of 11 or more.
[0062] exist Figure 4 , the upper curve represents such that Q / Q 0 The upper limit range of the taper width occupancy ξ relative to the taper length occupancy η is 1.1 or more, the lower curve shows the lower limit range, and the middle curve shows only the maximum value (ξmax). It should be noted that the maximum value ξmax is such that Q / Q 0 The value of the maximum value of ξ. Also, for the upper curve, in the range where the tapered length occupancy ratio η is 0.0168≤η≤0.1680, ξ is expressed as ξ=-4.723×1...
no. 2 Embodiment
[0070] Next, refer to Figure 5 pairs such that Q / Q 0 The description will be made for the range of 1.2 or more.
[0071] Figure 5 is shown such that Q / Q 0 It is a graph showing the relationship between the tapered length occupancy η (horizontal axis) and the tapered width occupancy ξ (vertical axis) of 1.2 or more. Here, for the taper length occupancy η and taper width occupancy ξ used, from the above image 3 is extracted such that Q / Q 0 It is in the range of 1.2 or more.
[0072] exist Figure 5 , the upper curve represents such that Q / Q 0 The upper limit range of taper width occupancy ξ relative to taper length occupancy η is 1.2 or more, the lower curve represents the lower limit range, and the middle curve represents a graph plotting only the maximum value (ξmax). It should be noted that the maximum value ξmax is such that Q / Q 0 The value of the maximum value of ξ. Moreover, for the upper curve, in the range where the tapered length occupancy ratio η is 0.0168...
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