Detection device and detection method for dynamic process of material micro-domain structure change

A technology of structural change and process detection, which is applied in the field of optical detection, can solve the problems that the focal length of the lens cannot be too short, the numerical aperture objective lens cannot be used, and the large space, etc., and achieve the effect of high repeatability, less human error, and accurate detection position
CN102262091AInactive Publication Date: 2011-11-30SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
Publication Date
2011-11-30
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention discloses a detection device and a detection method for dynamics process of structure change of a micro region of a material. The device comprises two paths of laser light, one path of laser light reacts with the material, which results in that the structure of the micro region of the material changes, and the second path of laser light detects the dynamics process of the structure change. In the device and the method, a sample is automatically adjusted to a focal point of the first path of laser light by a CCD (charge coupled device) imaging method and a piezoelectric ceramic, and an objective lens with high numerical aperture is used so as to obtain the structure change of the micro region; the two paths of laser light are coaxial and vertically incident on the surface of the sample, light spots formed on the surface of the sample by the two paths of laser light are simultaneously observed through a CCD, and consequently, and the light spots of the two paths of laser light can be accurately superposed, which facilitates the detection on the dynamics process of the structure change of smaller regions; the utilization rate of the laser light is improved through a polarization beam splitting prism and a quarter wavelength plate, the two coaxial paths of laser light are completely separated by a dispersing prism and a total reflection principle, influence of non-detection light is removed, and detection precision is improved.
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Description

technical field

[0001] The invention relates to the field of optical detection, in particular to a detection device and a detection method for the dynamic process of material micro-region structure change. Background technique

[0002] With the development of laser technology, laser-induced material structure changes are more and more widely used, such as integrated circuits, solar cells, optical devices, etc., and the dynamic process of material structure changes has also been studied more and more. In the process of material structure change, dynamic process and thermodynamic process complement each other. Thermodynamic process refers to the condition that the outside world gives the material a structural change. Kinetic process refers to the dynamic process of material structure change. The study of this process is not only beneficial to A deeper understanding of the properties of materials, such as the transformation of crystalline and amorphous materials, can also be us...

Claims

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