Micro-mechanical sensor device for measuring acceleration, pressure and similar parameters

A sensor device, micro-mechanical technology, applied in the direction of measuring acceleration, measuring device, measuring fluid pressure, etc., can solve the problems of large size and expensive acceleration sensor, achieve the effect of reducing size and improving flexibility

Active Publication Date: 2012-01-11
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, accelerometers based on capacitance changes are relatively large in their size and are therefore relatively expensive

Method used

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  • Micro-mechanical sensor device for measuring acceleration, pressure and similar parameters
  • Micro-mechanical sensor device for measuring acceleration, pressure and similar parameters
  • Micro-mechanical sensor device for measuring acceleration, pressure and similar parameters

Examples

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Embodiment Construction

[0029] Figure 1a A micromechanical sensor device V according to a first embodiment of the invention is shown.

[0030] Reference numeral 1 in FIG. 1 designates a test block, which has a center of gravity 2 . The test piece 1 is here elastically suspended by means of three transverse beams 6 a , 6 b , 6 c with corresponding contacts 5 a , 5 b , 5 c which in turn are arranged on the substrate S . These contacts 5a, 5b, 5c are fixedly arranged on said substrate S. As shown in FIG. The test block 1 can vibrate substantially perpendicularly to the longitudinal extent of the transverse beams 6 a , 6 b , 6 c , that is to say the acceleration acting on the test block 1 is balanced by a corresponding movement in direction R. Electrodes 3a, 3b are arranged on opposite sides of the test block 1 in parallel, that is to say in the direction relative to the respective deflection direction R, which electrodes 3a, 3b can communicate with the test by means of signals. Block 1 loads the forc...

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Abstract

The invention relates to a micro-mechanical sensor device for measuring acceleration, pressure and similar parameters. The device has a seismic mass movably arranged at a substrate. A converter unit e.g. resistors (WH, WS), converts forces by a piezoeffect unit to a piezoresistive and/or piezoelectric detection unit. The forces act on the seismic mass into an electric signal by a piezoeffect. A control unit controls a force application unit i.e. electrodes, such that the seismic mass is temporarily applied with supplementary force. The converter unit comprises suspensions i.e. beams, which movably define the seismic mass at the substrate. An independent claim is also included for a method for measuring acceleration and pressure for a micro-mechanical sensor device.

Description

technical field [0001] The invention relates to a micromechanical sensor arrangement for measuring acceleration, pressure and similar parameters. Background technique [0002] Micromechanical sensor devices in the form of acceleration sensors are required for a wide variety of applications, especially in motor vehicles for the measurement of acceleration for electronic stability programs or also for evaluation, airbags installed in motor vehicles Should it be triggered due to a car crash. Another field of application of the acceleration sensor is the consumer field, for example in this case the field of mobile phones, for which the acceleration sensor is used to rotate the display content according to the positioning of the mobile phone, so as to be able to The corresponding content of the display is displayed to the user in an upright readable form, independent of the position of the mobile phone. [0003] An acceleration sensor is already known from DE 44 26 163 A1, whic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/09G01L9/08
CPCG01P15/09G01L1/162G01L9/0022G01P2015/0828G01P15/123
Inventor R.诺伊尔A.弗兰克A.布曼M.恩格泽
Owner ROBERT BOSCH GMBH
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