The invention discloses a five-
mass-block biaxial detection
silicon micro resonant
gyroscope based on out-of-plane vibration. The
gyroscope comprises a first
mass block, a polar plate substrate, a transmission beam, two
mass blocks which are located at symmetrical positions and sensitive to Y-axis
angular velocity, two mass blocks which are located at symmetrical positions and sensitive to X-axis
angular velocity, detection comb teeth, anchor points, lever supporting beams and a frame. The first mass block and the polar plate substrate form a
capacitor structure, so that the first mass block generates simple
harmonic vibration in the Z-axis direction, and the simple
harmonic vibration is transmitted to the other four mass blocks through the supporting beams between the first mass block and the other four mass blocks. The the other four mass blocks are enabled to achieve
simple harmonic motion in the Z-axis direction the same as that of the first mass block, when
angular velocity in the X-axis direction or the Y-axis direction occurs,
Coriolis force is generated on the four mass blocks, and angular velocity detection in the X-axis direction and the Y-axis direction is achieved through the comb tooth detection structure. According to the invention, real-time, high-precision and high-sensitivity measurement of the out-of-plane vibration five-mass-block double-axis angular velocity is realized.