Five-mass-block biaxial detection silicon micro resonant gyroscope based on out-of-plane vibration

Abstract

The invention discloses a five-mass-block biaxial detection silicon micro resonant gyroscope based on out-of-plane vibration. The gyroscope comprises a first mass block, a polar plate substrate, a transmission beam, two mass blocks which are located at symmetrical positions and sensitive to Y-axis angular velocity, two mass blocks which are located at symmetrical positions and sensitive to X-axis angular velocity, detection comb teeth, anchor points, lever supporting beams and a frame. The first mass block and the polar plate substrate form a capacitor structure, so that the first mass block generates simple harmonic vibration in the Z-axis direction, and the simple harmonic vibration is transmitted to the other four mass blocks through the supporting beams between the first mass block and the other four mass blocks. The the other four mass blocks are enabled to achieve simple harmonic motion in the Z-axis direction the same as that of the first mass block, when angular velocity in the X-axis direction or the Y-axis direction occurs, Coriolis force is generated on the four mass blocks, and angular velocity detection in the X-axis direction and the Y-axis direction is achieved through the comb tooth detection structure. According to the invention, real-time, high-precision and high-sensitivity measurement of the out-of-plane vibration five-mass-block double-axis angular velocity is realized.

Description

Technical field[0001]The present invention belongs to the technical field of micro / nano electromechanical system, and more particularly to a five-quality block double-axis detected silicon micro resonant gyro based on outdoor vibration.Background technique[0002]The gyro is a sensor that measures the rotation angle speed of the measured object in space, so that the gyro is used to distinguish the angle of the object in unit time, and it is an important device in the field of inertial navigation, and plays an important role in attitude control. Traditional gyroscope includes mechanical rotor gyro, liquid floss gyro, flexible gyro, laser gyro and fibergroup, etc. Since the 1980s, the micromechanical processing technology based on IC process is started to be applied to the manufacture of sensors. The birth of this technology has greatly promoted the development of micro-mechanical gyro, and people began to develop silicon micro mechanical gyroscopes. In 1988, the US Draper laboratory ...

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Problems solved by technology

[0004] The research and investigation on the existing MEMS gyroscope structure is all about the measurement of single-axis angular velocity, and the solution to realize the measurement of two axial angular velocities at the same time point is to place two single-axis gyroscopes orthogonally to output two signals, which is also That is to say, two separate single-axis gyroscopes are used at the same time to realize the measurement of two axial angular velocities, and the simultaneous detection of two axial angular velocities by one gyro structure is not realized.

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