Method for improving stability and repeatability of extraction beam current of ion implanter
An ion implanter and stability technology, applied in discharge tubes, electrical components, circuits, etc., can solve the problems of variation, unsatisfactory stability and repeatability of the drawn beam, and achieve the effect of improving stability and repeatability
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[0021] The invention will be further introduced below in conjunction with the drawings.
[0022] See figure 1 , figure 2
[0023] The whole method is divided into 3 parts: arc starting, optimization, closed loop adjustment
[0024] 1. Arcing:
[0025] Set the initial value of each power supply, set the initial value of the lead electrode
[0026] The ion source gas is supplied to ensure the best working pressure of the ion source cavity corresponding to the doping elements
[0027] Wait for each power supply to work stably, wait for stable air supply
[0028] Slowly reduce the current of the filament power supply and keep the other power supplies unchanged at the initial value of the arc until an arc current is generated.
[0029] Continue to slowly reduce the filament power supply current to find the best filament power supply current, so that the bias power supply power is gradually increased to obtain the largest and most stable arc current.
[0030] If the power of the bias power supp...
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