Error compensating system using encoder feedback, error mapping and air pressure control

Abstract

PROBLEM TO BE SOLVED: To provide an error compensation system using encoder feedback, error mapping, and air pressure control. SOLUTION: A linear encoder 23 is comprised of a pair of side face linear encoders 23-1 and 23-1' installed on the side face of a mobile carriage 25 and a pair of low face linear encoders 23-2 and 23-2' installed at the lower part of one side section of the mobile carriage 25. This linear encoder 23 configured as mentioned above moves along a scale having a reference mark, an L track for compensating a vertical position error and a T track for compensating a horizontal position [error] so that it is possible to compensate an error relating to flatness, pitch, straightness, yaw, and roll in a high accurate level. Therefore, it is possible to minimize a section whose working is impossible, and to reduce working costs, and to achieve a precise stage.

Description

technical field [0001] The present invention relates to an error compensation system using encoder feedback, error mapping, and air pressure control; more particularly, the present invention relates to such an error compensation system using encoder feedback, error mapping, and air pressure control by using a portable gantry The system (Gantrysystem) provides real-time feedback as the error value in the left and right and up and down directions and then adjusts the pressure of the preload vacuum to this result value to precisely control the relative flatness, pitch, collimation, roll ( yaw) and roll error. Background technique [0002] In recent years, combined with industrial development, there has been a tendency for manufactured products and parts to become powerful and miniaturized; combined with developments in the fields of IT, BT, and NT, there has been a demand for production technology with nanometer precision. Among production systems commensurate with such circum...

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Problems solved by technology

[0007] In order to use various devices simultaneously in such a conventional measurement method, the assembly of these devices is complicated and the measurement operation is very difficult; in addition, assembly errors occur during equipment assembly

Therefore, when measuring errors, it is necessary to measure based on a uniform initial position; however, due to the use of various devices, it is often impossible to obtain an accurate initial position

[0008] Furthermore, with traditional measurement methods, in addition to the high possibility of error as described above, there is the fact that it is very difficult to confirm the accuracy of the measured values

[0009] Furthermore, among various devices used in conventional measurement methods, laser interferometers and autocollimators are extremely expensive devices; therefore, it is very unaffordable to install both devices at the same time from an economical point of view

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