X-ray fluorescence analyzer and X-ray fluorescence analysis method

Abstract

The invention provides an X-Ray fluorescence analyzer and an X-ray fluorescence analysis method advantaged by high operating efficiency and safe sample measuring. The fluorescence analyzer (100) includes: a radioactive ray source (2) illuminating radioactive rays upon a radioactive point (P1) on a smapel (S); an X-ray detector (3); a moving mechanism (8) capable of moving the sample with respect to the radioactive ray source and the X-ray detector;an enclosure (10); a door (20) for opening and closing an opening (10a) for the sample into and out of the enclosure; a height measurement mechanism (7) capable of measuring a height at the irradiation point; a moving mechanism control unit (9) for adjusting a distance between the sample and the radiation source as well as the X-ray detector based on the measured height at the irradiation point; a laser unit (7) for irradiating the irradiation point with a visible light laser beam; a laser start control unit (9) for irradiating the visible light laser beam by the laser unit (7) when the door is open state; and a height measurement mechanism start control unit (9) for starting the height measurement mechanism to measure the height at the irradiation point when the door is opened.

Description

technical field [0001] The present invention relates to a fluorescent X-ray analysis device and a fluorescent X-ray analysis method for performing fluorescent X-ray analysis and the like on the surface of a sample. Background technique [0002] Fluorescent X-ray analysis is to irradiate the sample with the X-rays emitted by the X-ray source, and the characteristic X-rays (fluorescent X-rays) emitted by the sample are detected by the X-ray detector, and the spectral lines are obtained from the energy, so that the sample is analyzed. Methods of qualitative or quantitative analysis. Fluorescent X-ray analysis is widely used in engineering / quality control, etc., because it does not damage the sample and can be analyzed quickly. In recent years, fluorescent X-ray analysis has achieved high precision / high sensitivity, enabling micro-measurement, and is expected to spread especially as an analysis method for detecting harmful substances contained in materials or composite electron...

AI Technical Summary

Problems solved by technology

[0004] Moreover, in the existing fluorescent X-ray analysis, it is necessary to move the sample in the x-y direction while optically observing the device to align the position with the X-ray irradiation position, which will lead to a decrease in work efficiency.

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