940 results about "X-ray fluorescence" patented technology

X-ray fluorescence (XRF) spectrometry has been used for detecting binding events and measuring binding selectivities between chemicals and receptors. XRF may also be used for estimating the therapeutic index of a chemical, for estimating the binding selectivity of a chemical versus chemical analogs, for measuring post-translational modifications of proteins, and for drug manufacturing.

X-ray fluorescence (XRF) spectroscopy systems and methods are provided. One system includes a source of x-ray radiation and an excitation optic disposed between the x-ray radiation source and the sample for collecting x-ray radiation from the source and focusing the x-ray radiation to a focal point on the sample to incite at least one analyte in the sample to fluoresce. The system further includes an x-ray fluorescence detector and a collection optic comprising a doubly curved diffracting optic disposed between the sample and the x-ray fluorescence detector for collecting x-ray fluorescence from the focal point on the sample and focusing the fluorescent x-rays towards the x-ray fluorescence detector.

Systems and methods for performing inspection and metrology operations on metallization processes such as on back-end-of-line (BEOL) metallization thickness and step coverage are disclosed. Specific examples include measurements of thickness and uniformity of barrier layers, including tantalum for example, and seed layers, including copper for example, in Damascene, including dual-Damascene, trenches during the interconnect fabrication steps of integrated circuit production. The invention also relates to the detection and measurement of void formation during and after copper electroplating. The invention utilizes x-ray fluorescence to measure the absolute thicknesses and the thickness uniformity of the barrier layers in the trenches, the copper seed layers for electroplating, and the final copper interconnects.

Systems, apparatuses and methods are described for integrating an electronic metrology sensor with precision production equipment such as computer numerically controlled (CNC) machines. For example, a laser distance measuring sensor is used. Measurements are taken at a relatively high sample rate and converted into a format compatible with other data generated or accepted by the CNC machine. Measurements from the sensor are synchronized with the position of the arm of the machine such as through the use of offsets. Processing yields a detailed and highly accurate three-dimensional map of a workpiece in the machine. Applicable metrology instruments include other near continuously reading non-destructive characterization instruments such as contact and non-contact dimensional, eddy current, ultra-sound, and X-Ray Fluorescence (XRF) sensors. Various uses of measurements include: multiple component matching, correction of machine drift, closed loop control of machines, and verification of product tolerances via substantially complete serialized dimensional quality control.

An X-ray diffraction and X-ray fluorescence instrument for analyzing samples having no sample preparation includes a X-ray source configured to output a collimated X-ray beam comprising a continuum spectrum of X-rays to a predetermined coordinate and a photon-counting X-ray imaging spectrometer disposed to receive X-rays output from an unprepared sample disposed at the predetermined coordinate upon exposure of the unprepared sample to the collimated X-ray beam. The X-ray source and the photon-counting X-ray imaging spectrometer are arranged in a reflection geometry relative to the predetermined coordinate.

An X-ray fluorescence spectrometric system includes a sample pre-treatment apparatus 10 for retaining on a surface of a substrate a substance to be measured that is found on the surface of the substrate, after such substance has been dissolved and subsequently dried, an X-ray fluorescence spectrometer 40, and a transport apparatus 50 for transporting the substrate from the sample pre-treatment apparatus towards the X-ray fluorescence spectrometer, which system as a whole is easy to operate. This spectrometric system also includes a control apparatus 50 for controlling the sample pre-treatment apparatus 10, the X-ray fluorescence spectrometer 40 and the transport apparatus 50 in a totalized fashion.

Apparatus and methods in which one or more elemental taggants that are extrinsically placed in an object are detected by x-ray fluorescence analysis to identify or authenticate the object are described. The taggant is manufactured as part of the object or the taggant is placed into a coating, packaging, label, or otherwise embedded onto the object for the purpose of later verifying the presence or absence of these elements by x-ray fluorescence. The taggant is then analyzed by XRF and the analysis is then converted into a 2D symbol format that can be used in various security and authentication applications. By using x-ray fluorescence analysis, the apparatus and methods of the invention are simple and easy to use, without the limitations experience by current anti-counterfeiting technologies.

Apparatus and methods in which one or more elemental taggants that are intrinsically located in an object are detected by x-ray fluorescence analysis under vacuum conditions to identify or verify the object's elemental content for elements with lower atomic numbers. By using x-ray fluorescence analysis, the apparatus and methods of the invention are simple and easy to use, as well as provide detection by a non line-of-sight method to establish the origin of objects, as well as their point of manufacture, authenticity, verification, security, and the presence of impurities. The invention is extremely advantageous because it provides the capability to measure lower atomic number elements in the field with a portable instrument.

A device, system and method for detecting and measuring concentrations of elements in fluids comprises: flowing a fluid through a central flow interelectrode gap of an ionic preconcentration cell separating an upper high specific surface area electrode from a lower high specific surface area electrode of the ionic preconcentration cell by a predetermined interelectrode gap width; and applying a voltage differential between the upper high surface area electrode and the lower high surface area electrode while the fluid is flowing through the central flow interelectrode gap. As such, this cell that utilizes its inherent capacitance for double layer formation to extract ultra-trace levels of ionic contaminants from fluids in order to enhance detection by x-ray fluorescence analysis.

A method of evaluating a reservoir includes a multi-energy X-ray CT scan of a sample, obtaining bulk density and photoelectric effect index effect for the sample, estimation of at least mineral property using data obtained from at least one of a core gamma scan, a spectral gamma ray scan, an X-ray fluorescence (XRF) analysis, or an X-ray diffraction (XRD) analysis of the sample, and determination of at least one sample property by combining the bulk density, photoelectric effect index, and the at least one mineral property (e.g., total clay content). Reservoir properties, such as one or more of formation brittleness, porosity, organic material content, and permeability, can be determined by the method without need of detailed lab physical measurements or destruction of the sample. A system for evaluating a reservoir also is provided.

The present invention determines one or more properties of a soil sample by scanning a soil sample using a visible near infrared diffuse reflectance diffuse reflectance (VisNIR) spectroradiometer, scanning the soil sample using a x-ray fluorescence (PXRF) spectrometer, receiving a diffuse reflectance spectra from the VisNIR spectroradiometer and an elemental data from the PXRF spectrometer, determining one or more properties of the soil sample using one or more processors and a predictive model that relates the diffuse reflectance spectra and the elemental data to the one or more properties, and providing the one or more properties of the soil sample to one or more input/output interface.

For small angles that are near critical angle, a primary incident X-ray beam has excellent depth resolution. A series of X-ray fluorescence measurements are performed at varying small angles and analyzed for depth profiling of elements within a substrate. One highly useful application of the X-ray fluorescence measurements is depth profiling of a dopant used in semiconductor manufacturing such as arsenic, phosphorus, and boron. In one example, angles are be varied from 0.01° to 0.20° and measurements made to profile arsenic distribution within a semiconductor wafer. In one embodiment, measurements are acquired using a total reflection X-ray fluorescence (TXRF) type system for both known and unknown profile distribution samples. The fluorescence measurements are denominated in counts/second terms and formed as ratios comparing the known and unknown sample results. The count ratios are compared to ratios of known to unknown samples that are acquired using a control analytical measurement technique. In one example the control technique is secondary ion mass spectroscopy (SIMS) so that the count ratios from the TXRF-type measurements are compared to ratios of integrals of SIMS profiles. In another example, the TXRF-type measurement ratios are compared to simulation profiles of known samples. Integrals of the SIMS profile that vary as a function of depth into the substrate correspond to the grazing incidence angles of the TXRF-like measurement and respective count rates.

The invention discloses a modeling method of a soil heavy metal content detection model and the application thereof. The modeling method includes the steps of collecting a soil sample, collecting the X-ray fluorescence spectrum of the sample, measuring the reference value of heavy metal element content to be measured in the soil sample, and establishing the correcting relation between the X-ray fluorescence spectrum and the reference value of heavy metal element content. The method can simultaneously perform rapid nondestructive examination to various heavy metal element contents of soil, has wide range of application and high universality and provides a technological base for the on-site detection of farmland soil heavy metal pollution.

The measurement head (101) of an X-ray fluorescence analyzer device is protected against heat from a hot target by using an adapter (201). It comprises a sheet of material having low thermal conductivity and has a three-dimensional shape that follows the form of a front part of the measurement head (101). Said sheet of material is attached to said measurement head (101) and has a central part (401) which defines an opening (202) coincident with a radiation window (109) in said measurement head (101). Said attachment means (204, 205, 301, 302, 311, 312) are located at a part of said sheet of material that is distant from said central part (401).

Methods and systems for performing simultaneous X-ray Fluorescence (XRF) and small angle x-ray scattering (SAXS) measurements over a desired inspection area of a specimen are presented. SAXS measurements combined with XRF measurements enables a high throughput metrology tool with increased measurement capabilities. The high energy nature of x-ray radiation penetrates optically opaque thin films, buried structures, high aspect ratio structures, and devices including many thin film layers. SAXS measurements of a particular location of a planar specimen are performed at a number of different out of plane orientations. This increases measurement sensitivity, reduces correlations among parameters, and improves measurement accuracy. In addition, specimen parameter values are resolved with greater accuracy by fitting data sets derived from both SAXS and XRF measurements based on models that share at least one material parameter. The fitting can be performed sequentially or in parallel.

A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measurements with GXR and high-resolution composition measurements with XRF using WDX detectors. A single x-ray beam can simultaneously provide the reflected x-rays for GXR and excite the thin film to generate characteristic x-rays for XRF. XRF can be combined with electron microprobe analysis (EMP), enabling XRF for thicker films while allowing the use of the faster EMP for thinner films. The same x-ray detector(s) can be used for both XRF and EMP to minimize component count. EMP can be combined with GXR to obtain rapid composition analysis and accurate thickness measurements, with the two techniques performed simultaneously to maximize throughput.

This invention discloses a method and apparatus for x-ray techniques using structured x-ray illumination for examining material properties of an object. In particular, an object with one or more regions of interest (ROIs) having a particular shape, size, and pattern may be illuminated with an x-ray beam whose cross sectional beam profile corresponds to the shape, size and pattern of the ROIs, so that the x-rays of the beam primarily interact only with the ROIs. This allows a greater x-ray flux to be used, enhancing the signal from the ROI itself, while reducing unwanted signals from regions not in the ROI, improving signal-to-noise ratios and/or measurement throughput

This may be used with a number of x-ray measurement techniques, including x-ray fluorescence (XRF), x-ray diffraction (XRD), small angle x-ray scattering (SAXS), x-ray absorption fine-structure spectroscopy (XAFS), x-ray near edge absorption spectroscopy, and x-ray emission spectroscopy.

This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to generate x-ray emission. This microprobe can be combined with energy-resolved detector or a fluorescence imaging system for material analysis applications.