Raman atomic force microscopic detection device and method

An atomic force microscopy and microscopic detection technology, applied in measurement devices, Raman scattering, scanning probe microscopy, etc., can solve the problems of restricting the popularization of Raman atomic force technology, complicated operation, etc. easy effect

Inactive Publication Date: 2012-03-21
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this kind of Raman atomic force technology is generally monopolized by large foreign companies, and its price is usually more than hundreds of thousands of dollars, and the operation is quite complicated. These factors have largely restricted the popularization of Raman atomic force technology. Especially in the promotion and application of our country

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  • Raman atomic force microscopic detection device and method
  • Raman atomic force microscopic detection device and method
  • Raman atomic force microscopic detection device and method

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Embodiment Construction

[0013] The invention adopts a Raman atomic force microscopic detection method to observe and measure a large-scale high-resolution micro-nano structure on the same sample, and at the same time perform microscopic measurement of the Raman spectrum characterizing the chemical properties of the sample.

[0014] Such as figure 1 As shown, the Raman atomic force microscopic detection device includes an atomic force microscopic probe 1, a Raman spectrum microscopic probe 2, an optical microscope 3, a sliding block 4, an optical platform 5, a Y-direction stepping electronically controlled translation stage 6, and a sample stage 7. Sample to be tested 8, first fixed block 9, second fixed block 10, first support column 11, second support column 12, support beam 13, X-direction stepping electric control translation platform 14, L-shaped fixed block 15 , Z-direction moving track 16, atomic force microscope probe crossbeam 17; the upper side of the optical table 5 is provided with the fi...

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Abstract

The invention discloses a Raman atomic force microscopic detection device and method. A first support post and a first fixing block are sequentially arranged on one side of an optical platform from top to bottom, a second support post and a second fixing block are sequentially arranged on the other side of the optical platform from top to bottom, a support cross beam is fixedly arranged at the upper ends of the first support post and the second support post, an X-direction stepping electric control transverse moving table is arranged above the support cross beam, a slide block is arranged on the X-direction stepping electric control transverse moving table, the lower end of the slide block is provided with a Z-direction moving rail, an L-shaped fixing block is arranged on the Z-direction moving rail, an atomic force microscopic probe cross beam is arranged on the L-shaped fixing block, an atomic force microscopic probe is arranged on the atomic force microscopic probe cross beam, both sides of the atomic force microscopic probe are respectively provided with a Raman spectrum microscopic probe and an optical microscope, and a Y-direction stepping electric control transverse moving table, a sample table and a sample to be measured are sequentially arranged on the optical platform from bottom to top. The micro nanometer form structure information and the microscopic Raman spectrum information of the samples can be obtained in real time on line.

Description

technical field [0001] The invention relates to a Raman atomic force microscopic detection device and method. It is used to observe and measure the micro-nano morphology and micro-Raman spectrum of samples in real time and online. Background technique [0002] With the rapid development of micro-nano technology, higher requirements are put forward for micro-nano detection equipment to realize micro-nano structure detection and performance characterization. Atomic force microscopy (AFM) technology and instruments are one of the most widely used tools in the field of micro-nano technology, including conventional atomic force, liquid phase / electrochemical atomic force, contact mode atomic force, tapping mode atomic force, large sample atomic force, etc. However, atomic force can only detect the morphology information of the sample surface and cannot judge the composition of the sample, while Raman spectroscopy can provide molecular structure information, and can give qualitati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/02G01Q60/24G01N21/65
Inventor 张冬仙史斌吴兰章海军
Owner ZHEJIANG UNIV
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