Raman atomic force microscopic detection device and method

Abstract

The invention discloses a Raman atomic force microscopic detection device and method. A first support post and a first fixing block are sequentially arranged on one side of an optical platform from top to bottom, a second support post and a second fixing block are sequentially arranged on the other side of the optical platform from top to bottom, a support cross beam is fixedly arranged at the upper ends of the first support post and the second support post, an X-direction stepping electric control transverse moving table is arranged above the support cross beam, a slide block is arranged on the X-direction stepping electric control transverse moving table, the lower end of the slide block is provided with a Z-direction moving rail, an L-shaped fixing block is arranged on the Z-direction moving rail, an atomic force microscopic probe cross beam is arranged on the L-shaped fixing block, an atomic force microscopic probe is arranged on the atomic force microscopic probe cross beam, both sides of the atomic force microscopic probe are respectively provided with a Raman spectrum microscopic probe and an optical microscope, and a Y-direction stepping electric control transverse moving table, a sample table and a sample to be measured are sequentially arranged on the optical platform from bottom to top. The micro nanometer form structure information and the microscopic Raman spectrum information of the samples can be obtained in real time on line.

Description

technical field [0001] The invention relates to a Raman atomic force microscopic detection device and method. It is used to observe and measure the micro-nano morphology and micro-Raman spectrum of samples in real time and online. Background technique [0002] With the rapid development of micro-nano technology, higher requirements are put forward for micro-nano detection equipment to realize micro-nano structure detection and performance characterization. Atomic force microscopy (AFM) technology and instruments are one of the most widely used tools in the field of micro-nano technology, including conventional atomic force, liquid phase / electrochemical atomic force, contact mode atomic force, tapping mode atomic force, large sample atomic force, etc. However, atomic force can only detect the morphology information of the sample surface and cannot judge the composition of the sample, while Raman spectroscopy can provide molecular structure information, and can give qualitati...

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Problems solved by technology

However, this kind of Raman atomic force technology is generally monopolized by large foreign companies, and its price is usually more than hundreds of thousands of dollars, and the operation is quite complicated. These factors have largely restricted the popularization of Raman atomic force technology. Especially in the promotion and application of our country

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