The invention relates to a method for controlling a cavity module of a resonant cavity reinforcing detector, which comprises: firstly, designing a cavity module of the resonant cavity reinforcing detector, initially setting the thickness of each structure layer of the detector, and leading samples to grow on a molecular beam epitaxy device, secondly, adopting a confocal laser Raman microscopy to measure reflectance spectrums of samples, and getting central positions of a high reflectivity belt and an actual cavity module position of a sample, thirdly, adopting an analog procedure, calculating out the thickness of a gallium arsenide layer which is totally corresponding to the high reflectivity belt of an actual sample, the thickness of an aluminium arsenide layer and the thickness of an actual cavity body, required by totally corresponding to the actual cavity module, fourthly, correcting the thickness of the gallium arsenide layer of the high reflectivity belt where samples firstly grow, the thickness of the aluminium arsenide layer and the thickness of the cavity body according to the data got through the step three, and correcting time parameters for growing samples on the molecular beam epitaxy, and leading new samples to grow, fifthly, adopting the confocal laser Raman microscopy to measure reflectance spectrums of new samples.