Confocal microscopic Raman spectrometer with angle resolution capacity

Abstract

The invention discloses a confocal microscopic Raman spectrometer with angle resolution capacity and relates to Raman spectrometers. The confocal microscopic Raman spectrometer comprises a microscope objective, a low-pass light filter, a high-pass light filter, a reflector, a beam splitter, adjustable diaphragms, a collimating lens, an optical fiber and a corresponding laser light source, a spectral signal detector, an illuminating light source and a CCD (Charge Coupled Device) camera, wherein light emitted by the laser light source enters the microscope objective through the optical fiber, the collimating lens, the high-pass light filter and the low-pass light filter, the positions of the incident parallel beams can be adjusted by moving the high-pass light filter from left to right along the horizontal direction, and an angle of exciting light which reaches the sample surface is adjusted. The first adjustable diaphragm can control the pore diameter of the incident parallel beams, and the positions of emergent parallel beams can be adjusted by moving the reflector from the left to right along the horizontal direction, so that an angle of Raman scattering light collected from the sample surface is adjusted; and the second adjustable diaphragm can control the pore diameter of the Raman scattering light beams, and the sample can be imaged through the illuminating light source, the beam splitter and the CCD camera.

Description

technical field [0001] The present invention relates to a Raman spectrometer, in particular to a confocal micro-Raman spectrometer with angular resolution, which can be used for different angles of excitation and different angles of Raman scattering measurements on samples, and at the same time can realize real-time observation of samples and Low-cost confocal microscopy testing for Raman spectroscopy. Background technique [0002] Raman spectroscopy is a commonly used technique in the study of surface-enhanced Raman spectroscopy (SERS), surface plasmon resonance (SPR), electrochemical processes, etc. When Raman spectroscopy is measured on submicron-nanoscale surface structures, the characteristics of the structure itself are closely related to the excitation direction of incident light and the direction of Raman scattering. Existing microscopic Raman spectroscopy detectors all adopt a transmission / reflection optical path structure, and the incident laser light and Raman sc...

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Problems solved by technology

Existing microscopic Raman spectroscopy detectors all adopt a transmission / reflection optical path structure, and the incident laser light and Raman scattered light share the same optical path on the object side of the microscopic objective lens, which cannot measure the angular characteristics of Raman scattering, such as Chinese patent 201110288486. X discloses a micro-confocal Raman spectrometer comprising a micro-confocal Raman module and a matched single grating spectrometer

Although total internal reflection fluorescence microscopy (TIRF) has certain variable-angle excitation capabilities, they all use parallel light excitation methods, do not have micro-area analysis capabilities, and do not have the function of variable-angle collection of Raman scattering, such as Chinese patent 200580037869.2 Disclosed a total internal reflection fluorescence microscope

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