Combined test system of micro-Raman spectroscopy and near infrared spectrometer

A near-infrared spectrometer and combined testing technology, applied in the field of spectral analysis, can solve problems such as different points and difficult materials

Inactive Publication Date: 2007-10-24
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

However, for some materials with inhomogeneous composition or some nanostructures, the spectra tested on the two spectrometers are often not at the same

Method used

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  • Combined test system of micro-Raman spectroscopy and near infrared spectrometer
  • Combined test system of micro-Raman spectroscopy and near infrared spectrometer
  • Combined test system of micro-Raman spectroscopy and near infrared spectrometer

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Embodiment Construction

[0025] Please refer to shown in Fig. 1, a kind of combined testing system of micro Raman spectrometer and near-infrared spectrometer of the present invention, this system comprises:

[0026] Visible light micro-Raman spectrometer RS, the spectrometer includes a sample platform SP and a detector GD working in the visible light range, the sample platform SP of the visible light micro-Raman spectrometer RS ​​is a two-dimensional automatic platform or a common sample platform, the The visible light micro-Raman spectrometer RS ​​is equipped with a micro-objective lens working in the near-infrared band;

[0027] Reflector RF, the reflector RF is located on the optical path of the visible light micro-Raman spectrometer RS, the reflector RF is coated with gold or aluminum film to improve the reflectivity of near-infrared signals;

[0028] A lens LNS, the lens LNS is located on the optical path refracted by the reflector RF;

[0029] A three-dimensional adjustment frame XYZ, the three...

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Abstract

A couple test system of microscope Laman spectrometer and near infrared spectrometer comprises a visible microscope Laman spectrometer which comprises a sample platform and a detector in visible range, a mirror on the path of the visible microscope Laman spectrometer, a lens on the reflective path of the mirror, a three-dimension adjusting support on the path of the lens, a multi-model quartz fiber with one end fixed on the three-dimension adjusting support while another end is connected with a near infrared spectrometer. The mirror shifts the fluorescence signal emitted from the sample on the visible microscope Laman spectrometer, and the fluorescence signal is focused by the lens to be radiated into the core of the multi-mode quartz fiber which position is adjusted accurately by the three-dimension adjusting support, and the multi-mode quartz fiber transmits the signal to the near infrared spectrometer to measure fluorescence spectrum.

Description

technical field [0001] The invention relates to the technical field of spectral analysis, in particular to a combined testing system of a micro Raman spectrometer and a near-infrared spectrometer. Background technique [0002] Raman scattering is a phenomenon of inelastic scattering of light and matter. Raman spectroscopy based on this phenomenon is an important modern spectral analysis technology. It has been used in solid state physics, semiconductor physics, catalysis, surface, biochemistry, material characterization and gemstones It is widely used in fields such as identification, and many important information about the structure of substances can be obtained by virtue of it. Compared with other experimental methods such as neutron scattering, Raman scattering has many advantages, for example, it does not damage the sample, requires very few samples, and can use the microscopic optical path system to perform micro-region detection and imaging tests on samples. The exper...

Claims

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Application Information

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IPC IPC(8): G01N21/65G01N21/00
Inventor 谭平恒李桂荣朱汇甘华东
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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