Polycrystalline silicon reduction furnace with 48 pairs of rods

A technology of polysilicon and reduction furnace, which is applied in the field of reduction furnace for producing polysilicon and reduction furnace for producing polysilicon by electrochemical reaction, which can solve the problems of affecting product quality cost, large power consumption, and high production cost
CN102392299AInactive Publication Date: 2012-03-28SHUANGLIANG NEW ENERGY EQUIP
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SHUANGLIANG NEW ENERGY EQUIP
Publication Date
2012-03-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a polycrystalline silicon reduction furnace with 48 pairs of rods, especially to a reduction furnace for manufacturing polysilicon by electrochemical reaction. The polycrystalline silicon reduction furnace provided by the invention comprises a furnace body (1) and a chassis (2) and is characterized in that the furnace body (1) is equipped with a cooling water jacket; the chassis (2) is provided with a water-cooled structure; and 48 pairs of electrodes, namely 96 electrodes, are uniformly arranged on four circles of the chassis (2), wherein the outermost circle of the chassis (2) is provided with 18 pairs of electrodes (4); the second circle is equipped with 14 pairs of electrodes (4); the third circle is provided with 10 pairs of electrodes (4); the innermost circle is provided with 6 pairs of electrodes (4); and anode and cathode of the electrodes (4) are arranged one by one at intervals on the chassis (2). The polycrystalline silicon reduction furnace provided by the invention has a reasonable internal structure layout. The output of a single polycrystalline silicon reduction furnace is raised in comparison with that of a present reduction furnace. The invention can be used to greatly reduce the relative production power consumption of polysilicon per kilogram and relatively decrease the comprehensive energy consumption and production cost of polysilicon.
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Description

technical field

[0001] The invention relates to a reduction furnace for producing polysilicon, in particular to a reduction furnace for producing polysilicon by electrochemical reaction. It belongs to the technical field of polysilicon preparation. Background technique

[0002] Polycrystalline silicon is the direct material for the production of monocrystalline silicon, and high-purity polycrystalline silicon is the basic material for semiconductor devices such as photoelectric conversion cells and integrated circuits. With the rapid development of the world's semiconductor industry, a large number of applications of ultra-large-scale integrated circuits, and a large demand for photovoltaic cells, the demand for polysilicon in the whole world is increasing significantly.

[0003] The polysilicon reduction furnace is the main equipment for producing polysilicon, and the polysilicon reduction furnace is also a high energy consumption equipment. Therefore, the quality of the ...

Claims

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