Light irradiation device

Abstract

PROBLEM TO BE SOLVED: To provide a light radiation device capable of performing a light radiation process ensuring high in-plane uniformity of luminance in the light radiated surface of an object to be processed.SOLUTION: The light radiation device has a light source element composed of: a long lamp held by a housing at both ends in a lengthwise direction and having a rectangular cross-section perpendicular to the lengthwise direction; and a light transmitting, long, and cylindrical jacket pipe provided with both ends thereof in the lengthwise direction held by the housing while the lamp is inserted therein and defining a cooling air circulation passage inside. A supporter for directly supporting the lamp with respect to the jacket pipe at a partial position in the lengthwise direction is provided inside the jacket pipe. The supporter has a supporter body, made of an insulation material, which is in contact with the corners of the four ridges of the lamp, thereby sandwiching and holding the lamp. The supporter body has a jacket pipe contact part, which is in contact with the internal surface of the jacket pipe and has an elastic member.

Description

technical field [0001] The present invention relates to a light irradiation device. Background technique [0002] LCD panel 70 as Figure 8 As shown, it is a structure in which liquid crystal is sealed between two glass plates. The first glass plate 71 on which the alignment film 74 is formed and the second glass plate 75 on which the color filter 76 , the transparent electrode 77 , and the alignment film 78 are formed face each other on one side through a spacer member 79 . It is disposed and formed by forming a liquid crystal layer 80 between the first glass plate 71 and the second glass plate 75 . [0003] In the manufacturing process of this kind of liquid crystal panel 70, it is known to carry out the reaction treatment of the liquid crystal panel material (pretilt angle finding) processing, PSVA) technology (refer to Patent Document 1). In this technique, by irradiating ultraviolet rays to the liquid crystal panel while applying a voltage, the optically active mater...

AI Technical Summary

Problems solved by technology

[0013] However, in this cooling method, the excimer lamp shakes due to the turbulence generated inside the outer tube, and there is a problem that the lamp is broken due to the vibration.

[0014] Furthermore, due to the shaking of the excimer lamp, the size and position of the region irradiated with light from the excimer lamp change, which impairs the uniformity of illuminance on the light irradiation surface of the object to be processed.

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