A multi-
particle beam system (1) comprising the following: a multi-beam
particle source (21) configured to generate a first field of a plurality of charged first particle beams (3); a first particle optic (80) with a first particle-
optical beam path configured to map the generated single-particle beams (3) onto an object plane (101) such that the first particle beams (3) meet at points of
impact on an object (7) forming a second field; a detection
system (13) with a plurality of detection areas forming a third field; a second particle
optics (90) with a second particle-
optical beam path configured to map second single-particle beams (9) originating from the points of
impact in the second field onto the third field of the detection areas of the detection
system (13) (102); a magnetic objective lens (102), in particular a magnetic immersion lens, through which both the first (3) and the second single-particle beams (9) pass; a
beam splitter (400) arranged in the first particle-
optical beam path between the multi-beam
particle source (21) and the objective lens (102), and arranged in the second particle-optical beam path between the objective lens (102) and the detection system (13); and a controller (10); wherein in the second particle-optical beam path between the beam switch (400) and the detection system (13) a
beam crossing (510) of the second single-particle beams (9) takes place, wherein in the area of
beam crossing (510) a contrast aperture (511) with a central recess for filtering the second single-particle beams (9) according to their starting angles from the object plane (101) is arranged, wherein in the second particle-optical beam path between the objective lens (102) and the contrast aperture (511) a contrast-correction lens system (500) with a first
magnetic contrast-correction lens (500) is arranged, which is configured to generate a
magnetic field of adjustable strength and to correct beam tilts of the second single-particle beams (9) in the
beam crossing (510) with respect to the
optical axis (Z) of the multi-
particle beam system (1), and wherein the control (10) is configured to control the excitation of the contrast correction lens system (500).