Efficient energy-saving type polysilicon reduction furnace

Abstract

The invention relates to an efficient energy-saving type polysilicon reduction furnace, which comprises a support seat (1), a water jacketed double-pipe plate (7) and a furnace body, wherein the furnace body consists of a furnace tube inner wall (14) and a furnace tube outer wall (16). The efficient energy-saving type polysilicon reduction furnace is characterized in that a heat reflection coating (17) is arranged on the furnace tube inner wall (14), a spiral support plate (19) is arranged between the furnace tube inner wall (14) and the furnace tube outer wall (16), the lower part of the furnace tube outer wall (16) is provided with a cooling water inlet (22), cooling water is discharged out of the furnace body between the furnace tube inner wall (14) and the furnace tube outer wall (16)along a water vapor outlet (18) which spirally ascends to the top of the furnace body, several circles of electrode sleeves (12) are arranged in the water jacketed double-pipe plate (7), an electrode(5) is penetrated in the electrode sleeves (12), an inner cavity of the water jacketed double-pipe plate (7) is communicated with a water inlet and distributing pipe (3), multiple circles of raw material gas spray nozzles (21) are arranged on the surface of the water jacketed double-pipe plate (7), and a tail gas exhaust pipe (26) and a cooling water discharge pipe (25) communicated with the inner cavity of the furnace body are connected with the center of the water jacketed double-pipe plate (7). The efficient energy-saving type polysilicon reduction furnace has the advantages that the temperature uniformity in the furnace is good, and the energy saving effect is obvious.

Description

technical field [0001] The invention relates to a new solar material silicon rod manufacturing equipment, in particular to a polysilicon reduction furnace, in particular to a large-scale high-efficiency and energy-saving polysilicon reduction furnace. Background technique [0002] At present, in the severe situation of high crude oil prices in the world, saving energy and improving energy utilization efficiency have attracted great attention from all countries in the world. In addition, because the energy needed by human beings mainly depends on oil, coal, etc., thermal power and industrial production emit a large amount of CO 2 , global warming is evident. The energy crisis and the deterioration of the ecological environment have become the bottleneck of the development of human civilization. my country's rapidly developing economy and people's living standards continue to improve, energy demand has increased significantly, and carbon emissions have increased day by day....

AI Technical Summary

Problems solved by technology

[0014] The purpose of the present invention is to design a large-scale, high-efficiency and energy-saving polysilicon reduction furnace for the problems of low single-furnace output and high energy consumption in the current polysilicon reduction furnace.

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