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Nitrogen-containing functional group substituted alkoxy rare-earth metal lanthanum and gadolinium complex and synthetic method and application thereof

A nitrogen-containing functional group and alkoxy rare earth technology, applied in the application field of ALD precursors in the preparation of high-K materials, to achieve the effects of good flatness, easy preparation, and reasonable price

Inactive Publication Date: 2014-07-23
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In general, the substrate temperature is controlled above 200°C, La[N(SiMe 3 ) 2 ] 3 It is sublimated into gas and H at about 125°C under high vacuum 2 O undergoes a chemical reaction to form La 2 o 3 Thin film, but Si impurity in the film (4~10 at%)

Method used

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  • Nitrogen-containing functional group substituted alkoxy rare-earth metal lanthanum and gadolinium complex and synthetic method and application thereof
  • Nitrogen-containing functional group substituted alkoxy rare-earth metal lanthanum and gadolinium complex and synthetic method and application thereof
  • Nitrogen-containing functional group substituted alkoxy rare-earth metal lanthanum and gadolinium complex and synthetic method and application thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Example 1 La{OCH[CH 2 N(CH 3 ) 2 ] 2} 3 Synthesis of complexes.

[0030] After removing water and oxygen from the reaction bottle, the inert gas N 2 protection, 1.2080g La[N(SiMe 3 ) 2 ] 3 0.8546 g of 1,3-bis(dimethylamine) isopropanol solution dissolved in THF was slowly added dropwise to the THF solution, returned to 30° C. and stirred for 12 hours, and the solution was clear and transparent. The solvent was drained, extracted with toluene to obtain a filtrate, and drained to obtain a white powder. Yield: 90% (1.006 g, 1.75 mmol).Anal.Calc.for C 33 h 75 GdN 6 o 3 : C, 52.07; H, 9.93; N, 11.04; Found: C, 52.10; H, 9.90, N, 11.03. 1 H NMR (500MHz, C 6 D. 6 ): δ 4.12 (m, 1H, OCH), 2.796 (s, 12H, CH 2 / N(CH2 CH 3 ) 2 ), 2.456 (m, 4H, NCH 2 ), 1.134(t, 12H, CH 3 / N(CH 2 CH 3 ) 2 ). 13 C NMR (300MHz, C 6 D. 6 ): δ 71.60 (OCH), 68.57 (NCH 2 ), 47.14 (N (CH 3 ) 2 ).

Embodiment 2

[0031] Example 2 Gd{OCH[CH 2 N(CH 3 ) 2 ] 2} 3 Synthesis of complexes

[0032] After removing water and oxygen from the reaction bottle, the inert gas N 2 protection, 0.9231g Gd[N(SiMe 3 ) 2 ] 3 0.6185 1,3-bis(dimethylamine) isopropanol solution dissolved in THF was slowly added dropwise into the THF solution, returned to 25° C. and stirred for 16 h, the solution was clear and transparent. The solvent was drained, extracted with toluene to obtain a filtrate, and drained to obtain a white powder. Yield: 92% (0.7879g, 1.33 mmol).Anal.Calc.for C 18 h 42 LaN 3 o 3 : C, 42.54; H, 8.67; N, 14.17; Found: C, 42.50; H, 8.69; N14.16.

Embodiment 3

[0033] Example 3 La{OCH[CH 2 N(CH 2 CH 3 ) 2 ] 2} 3 Synthesis of complexes

[0034] After removing water and oxygen from the reaction bottle, the inert gas N 2 protection, 1.583g La[N(SiMe 3 ) 2 ] 3 A solution of 1.549 g of 1,3-bis(diethylamine)isopropanol dissolved in toluene was slowly added dropwise into the toluene solution, and the temperature was returned to 25° C. and stirred for 12 hours, and the solution was clear and transparent. The solvent was removed, and the filtrate was obtained by extraction with n-hexane, which was dried to obtain a colorless oily liquid. Yield: 90% (1.748g, 2.296 mmol).Anal.Calc.for C 33 h 75 LaN 6 o 3 : La, 26.23; C, 47.63; H, 9.14, Found: La, 26.20; C, 47.65; H, 9.15. 1 H NMR (300MHz, C 6 D. 6 ): δ 3.69 (m, 1H, CHO), 2.37 (m, 4H, CH 2 / N(CH 2 CH 3 ) 2 ), 2.04 (d, J=5.8 Hz, 2H, CH 2 N), 1.14(d, J=5.7 Hz, 3H, CH 3 / CH 3 CH), 1.02(t, J=7.0 Hz, 6H, CH 3 / N(CH 2 CH 3 ) 2 ). 13 C NMR (300MHz, C 6 D. 6 ): δ 72.32 (CHO...

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Abstract

The invention discloses a nitrogen-containing functional group substituted alkoxy rare-earth metal lanthanum and gadolinium complex. The complex is shown as a formula in the specifications. The nitrogen-containing functional group substituted alkoxy rare-earth metal lanthanum and gadolinium complex is applied to an atomic layer deposition technology, has the advantages of adequate volatility, appropriate heat stability, adequate reaction activity, substrate matching property, appropriate price, low toxicity and the like, and is easy to prepare.

Description

technical field [0001] The present invention relates to metal-organic complexes and their synthesis methods, in particular to a series of nitrogen-containing functional group-substituted alkoxy rare earth metal lanthanum and gadolinium complexes and their synthesis methods and their application as ALD precursors in the preparation of high-K materials . technical background [0002] With the rapid development of integrated circuits, SiO 2 As a traditional gate dielectric, it cannot meet the high integration requirements of metal-oxide-semiconductor field effect transistor (MOSFET) devices, and a new high-K material is needed to replace the traditional SiO 2 , which requires comprehensive consideration of the following aspects: ① has high dielectric constant, high potential barrier and energy gap; ② has good thermal stability on Si; ③ amorphous gate dielectric is more ideal; ④ has Good interface quality; ⑤ compatible with Si-based gate; ⑥ compatibility of processing technolo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C07F5/00H01L29/51
Inventor 沈应中汤清云陶弦冯猛王玉龙方江涛沈克成
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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