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Detecting method and detecting device for surface shape

A technology of surface shape and inspection method, applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as difficult to absorb, and achieve the effect of cheap device structure

Inactive Publication Date: 2012-05-09
ASAHI GLASS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Depending on the composition of the glass, there are some types that are difficult to absorb, and this method may not be easy to use

Method used

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  • Detecting method and detecting device for surface shape
  • Detecting method and detecting device for surface shape
  • Detecting method and detecting device for surface shape

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Experimental program
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Embodiment Construction

[0047] under,

[0048] Embodiments of the present invention will be described with reference to the drawings.

[0049] figure 1 It is a schematic diagram showing the outline of an inspection device for inspecting the flatness of the surface of a transparent plate-shaped object such as a glass plate. Such as figure 1 As shown, the inspection device is constituted as follows: a camera 2 as an imaging unit is used to photograph an inspection object (object to be inspected) placed on a mounting table (not shown), that is, a surface reflected on a transparent plate-shaped body 3 such as a glass plate. Stripe pattern1. The stripe pattern 1 is provided on the light emitting surface of the light source (not shown). figure 2 It is an explanatory diagram showing an example of the stripe pattern 1 . exist figure 2 Medium, L 1 Indicates the width of the dark part, L 2 Indicates the width of the bright part. L 1 +L 2 Equivalent to the cycle of light and dark. In the case wh...

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Abstract

The invention provides a detecting method and a detecting device, which can remove the influences of back reflected image and detect the characteristics of surface shape with a high precision by a cheap device structure. The detecting method comprises the steps that: firstly, stripes applicable for a transparent plate-shaped body (3) (a detected object) are determined to be set in a separating manner in image signals which are acquired by photographing reflected images formed on the surface of the transparent plate-shaped body and the reflected images formed on the back surface of the transparent plate-shaped body; then, the determined stripes (1) are used, and the surface shape of the transparent plate-shaped body (3) is evaluated through image analysis only by the reflected images, which are formed on the surface of the transparent plate-shaped body (3), of the stripes (1).

Description

technical field [0001] The present invention relates to an inspection method and an inspection device for inspecting surface shape characteristics such as flatness of an object typified by mirror-like glass. Background technique [0002] As a method of inspecting the surface shape of an object, there is a method of irradiating the object to be inspected with a periodic light and dark fringe pattern, based on the shift of the light and dark cycle of the reflected image formed by reflection on the surface of the object to be inspected, the surface of the object to be inspected A method of evaluating the shape (for example, refer to Patent Document 1). However, when this method is applied to a transparent plate-shaped object such as a glass plate, not only the reflected image formed on the surface of the transparent plate-shaped object but also the reflected image formed on the back surface of the transparent plate-shaped object is captured. Hereinafter, the reflected image fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30G01B11/24
Inventor 尊田嘉之大音仁昭加藤宗寿城山厚
Owner ASAHI GLASS CO LTD
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