Maskless lithography device
A maskless lithography and lithography technology, applied in the field of microelectronics, can solve the problem of inability to achieve precise adjustment of the distance between the focusing diffractive optical element and the substrate, and achieve the effects of simple structure, low cost and high focusing precision
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[0020] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0021] The present invention provides a maskless lithography apparatus, comprising a focusing diffractive optical element for mapping a preset lithographic pattern to a substrate; a first moiré grating group located on a plane where the focusing diffractive optical element is located above, including at least two moiré gratings, for adjusting the distance between the focusing diffractive optical element and the substrate by utilizing the movement of the moiré fringes generated by the moiré gratings. The focusing diffractive optical element and the focusing assembly are formed by etching a light-transmitting substrate coated with an opaque metal film. Preferably, the focusing diffractive optical element and the first moiré...
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