Optical detection method of ten-nanometer-magnitude sizes and errors

A technology of optical detection and size, which is applied in the field of optical detection, can solve the problems of eliminating human errors and fluctuations, and achieve the effects of repeatability assurance, avoiding uncertainty and human errors, and flexible methods

Active Publication Date: 2014-04-16
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Claims
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Problems solved by technology

The optical microscope is equipped with a digital imaging system and a large-screen display, which brings great convenience to the operation. With the cooperation of some operating software, the image formed can also be directly measured and interpreted, which improves the resolution and accuracy. The influence of human errors and fluctuations has not been fundamentally eliminated

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  • Optical detection method of ten-nanometer-magnitude sizes and errors
  • Optical detection method of ten-nanometer-magnitude sizes and errors

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Embodiment Construction

[0020] Below in conjunction with specific embodiment, further illustrate the present invention. It should be understood that these examples are only used to illustrate the present invention and are not intended to limit the scope of the present invention. In addition, it should be understood that after reading the teachings of the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims of the present application.

[0021] Embodiments of the present invention relate to a simple and reliable ten-nanometer size and error optical detection method, such as figure 1 As shown, the implementation steps are as follows:

[0022] (1) A Leica DM4000M scientific research-grade intelligent microscope equipped with a Leica DFC500CCD digital camera was used in the test, equipped with a 150x objective lens and a 10x eyepiece (the actual magnification of ...

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Abstract

The invention relates to an optical detection method of ten-nanometer-magnitude sizes and errors. The method comprises the following steps of: utilizing a digital imaging microscopic device to carry out digital imaging on an object to be tested; extracting a pixel position coordinate and strength information which correspond to size information of the object to be tested from the digital imaging process, and processing and counting the pixel position coordinate and the strength information as target information; and obtaining needed relative size parameters and error parameters of the object to be tested according to a counted result. According to the optical detection method of the ten-nanometer-magnitude sizes and errors, the surface appearance resolution ratio of an optical microscopic system can be obviously improved and the influences caused by artificial factors can be eliminated to the greatest extent, so that measured data is more credible and reliable.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a method for optical detection of ten nanometer scale dimensions and errors. Background technique [0002] Invented hundreds of years ago, the optical microscope has become the most widely used conventional optical device in a variety of fields. However, the development of optical microscopes is limited by physical limits and technical conditions, so there are some problems in terms of performance and use. For example, the maximum magnification of the objective lens of conventional devices can only reach 100-150 times. The magnification of the optical system is generally limited to about 10 times, so the highest total magnification available is about a thousand times. Considering the actual resolution of the human eye, the resolution of such an optical system is on the order of 1 / 4 micron. Although the result can be improved by some special optical measures, it will af...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/04
Inventor 张永刚李成顾溢
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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