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69results about How to "Improve absolute accuracy" patented technology

Field measurement device of wave aberration of projection objective in photo-etching machine

The invention relates to a field measurement device of wave aberration of a projection objective in a photo-etching machine. The device is based on the shack-hart mann measurement principle, and comprises a host machine and a standard lens, wherein the host machine comprises a photoelectric sensor, a diffraction optical element, a collimator objective, a pinhole maskplate provided with a round hole, and a beam splitting device used for controlling light path transmission; the standard lens includes a first standard lens used for folding back light path when in systematic error of the demarcated host machine, and a second standard lens used for folding back the light path when the wave aberration of the projection objective is measured by the host machine. The host machine and the first standard lens are integrated on a reticle mask stage of the photo-etching machine, and the second standard lens is integrated on a silicon chip stage; when in measurement, the silicon chip stage and the reticle mask stage are moved to the measuring position for measuring and correcting the wave aberration of full view field of the projection objective in the photo-etching machine. The field measurement device has higher absolute measuring accuracy, is suitable for the field measurement of the wave aberration of the projection objective in the photo-etching machine, reduces the cost, the volume and the weight of the device, and is convenient for integration.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

Method for offline acquisition of airborne InSAR (Interferometric Synthetic Aperture Radar) motion error by utilizing high-precision POS (Position and Orientation System)

The invention relates to a method for offline acquisition of an airborne InSAR (Interferometric Synthetic Aperture Radar) motion error by utilizing a high-precision POS (Position and Orientation System). The method comprises the steps of acquiring location information of and below quadratic term, of an SINS (Ship's Inertial Navigation System) center by utilizing a combined measurement result of the SINS and a GPS (Global Positioning System) in the high-precision POS; acquiring location information above the quadratic term, of the SINS center by employing a purely inertial measurement result of the SINS; adding the calculated location information of and below the quadratic term to the calculated location information above the quadratic term and compensating a lever arm effect error; calculating high-precision smooth location information of two antenna phase centers of the airborne InSAR; then, subtracting a first-order polynomial fitting result from the high-precision smooth location information; and finally acquiring the motion error of the two antennas of the airborne InSAR. The method provided by the invention has the characteristics of high precision and simplicity for calculation, and can be used for offline calculation of the motion error of the airborne high-precision InSAR in order to realize high-precision offline imaging for the airborne InSAR.
Owner:BEIHANG UNIV

High-stability polarization spectrum frequency stabilizing device

The invention relates to the technical field of laser frequency stabilization, in particular to a high-stability polarization spectrum frequency stabilization device suitable for polarization spectrumfrequency stabilization. According to the invention, the problem that the line type of a frequency discrimination curve (or a polarization spectrum) in the existing polarization spectrum frequency stabilization technology is easily influenced by output laser power fluctuation, optical element vibration and laser polarization change is solved; the intensity of two weak light beams needing to be detected in the polarization spectrum is stabilized through the feedback circuit, so that the frequency discrimination curve lines are the same during each time of frequency stabilization, and the absolute precision of frequency locking of the polarization spectrum is improved. The high-stability polarization spectrum frequency stabilizing device comprises a semiconductor laser, a shaping prism, a half-wave plate, a polarization splitting prism (polarization splitting prism), a convex lens, an acoustic optical modulator, a radio frequency signal generator, a power amplifier, a quarter-wave plate, a reflector, a single-channel photoelectric detector, an atomic vapor bubble, a light blocking block, a balance photoelectric detector and a feedback circuit.
Owner:SHANXI UNIV

Ultra-deep pipeline detection system with calculation and analysis function

The invention discloses an ultra-deep pipeline detection system with a calculation and analysis function. The ultra-deep pipeline detection system comprises a signal transmitter, a signal receiver, ahardware circuit and a PC terminal, wherein the signal transmitter comprises a power supply module, a man-machine interaction module, a CPU core module and a signal generation module; the signal receiver is a downward-pressing type ultra-deep pipeline detector; the hardware circuit comprises a transformer circuit, a digital power amplifier board circuit, a detection signal generation circuit of the signal transmitter, and a detection signal receiving circuit, a detection signal transmission circuit and a detection signal processing circuit of the signal receiver; and processing software of thePC terminal is underground pipeline alternating magnetic field digital signal acquisition and analysis software, and has a signal absolute value calculation and analysis function. The ultra-deep pipeline detection system is used for an ultra-deep pipeline, the detection device detects the trend and the burial depth of the target pipeline based on an electromagnetic induction principle, the absolute precision of measurement can be effectively improved, an alarm can be automatically given when the detection device is close to the pipeline, and the safety is higher; and the ultra-deep pipeline detection system provides the real-time data calculation and analysis function, so that the detection operation when the underground target pipeline condition is complex is met.
Owner:广州市天驰测绘技术有限公司

Speed measurement system capable of improving speed control precision of incremental photoelectric encoder

The invention discloses a speed measurement system capable of improving the speed control precision of an incremental photoelectric encoder. The speed measurement system comprises the incremental photoelectric encoder, a differential speed measurement module, a speed instruction input end, a speed P control module, a current loop, a motor, an integration module and a speed I control module, wherein one path of the incremental photoelectric encoder is connected with an input end of the motor through the differential speed measurement module, the speed P control module and the current loop in sequence, and one path of the speed instruction input end is connected with the input end of the motor through the speed P control module and the current loop in sequence; and the other path of the speed instruction input end is connected with the input end of the motor through the integration module, the speed I control module and the current loop in sequence, and the other path of the incremental photoelectric encoder is connected with the input end of the motor through the speed I control module and the current loop in sequence. The speed measurement system can effectively reduce the speed feedback calculation error caused by position differentiation, so that the speed control absolute precision is improved, and the machining precision and other control performance of mechanical equipment are improved.
Owner:SHENZHEN MICNO ELECTRIC CO LTD
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