Laser divergence angle measuring device and measuring method based on full-automatic hole alignment method
A measuring device and fully automatic technology, applied in the field of optical detection, can solve the problems of accurate judgment of the center of the beam and the center of the small hole, large error in the measurement result, and inability to accurately measure, etc., to achieve the effect of accurate laser divergence angle and high precision
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[0030] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0031] like figure 1 As shown, the present invention is based on the measurement device of the laser divergence angle of the automatic trepanning method, including a calculation control unit, a stepping motor controller and a laser, and a telephoto lens is arranged successively along the horizontal advancing direction of the laser beam generated by the laser, with a Aperture aperture array, mirror and CCD with multiple light-transmitting apertures, wherein the aperture aperture array is on the focal length of the telephoto lens, and the reflector and the laser beam form an angle of 45 degrees; the laser beam is reflected by the reflector An energy meter is installed on the formed vertical optical path; a two-dimensional electronically controlled translation stage is connected to the aperture diaphragm array, and a one-dimensional electronicall...
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