On-line in situ detecting method for infrared-ultraviolet double pulse laser induced breakdown spectroscopy
A laser-induced breakdown and in-situ detection technology, applied in the direction of material excitation analysis, can solve the problems of low plasma temperature and density, high detection limit, low analytical sensitivity, etc., to improve sensitivity, prolong relaxation time, Enhances the effect of spectral radiant intensity
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[0050] Embodiment: Figures 1 to 3 show the structure of the detection device used in the detection method of the present invention. The core components include infrared band laser 1 (take 1064nm Nd:YAG nanosecond pulse laser as an example); ultraviolet band laser 2 (take 193nm ArF excimer nanosecond pulse laser as an example); pulse delay controller 3; the first beam remote Convergence adjustment device 4; second beam remote convergence adjustment device 5; spectrum remote receiving device 6; seven-channel high-resolution micro-optical fiber 7; full-band laser-induced attenuation spectrometer 8; and computer 9, etc.
[0051] like Figure 4 Shown is a flow chart of an infrared-ultraviolet double-pulse laser-induced breakdown spectroscopy online in-situ detection method according to the present invention, which includes the following steps:
[0052] The first step is to set the delay time of the pulse delay controller 3 according to the excitation characteristics of the sample t...
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