Rectangular plane cathode arc evaporation source of combination magnetic fields
A technology of arc evaporation and planar cathode, which is applied in the direction of vacuum evaporation plating, circuit, discharge tube, etc., can solve the problems of insufficient arc spot movement area, difficulty in obtaining flat dome shape, and large splashing droplets, etc., to achieve improved Target utilization, convenient regulation, and the effect of heat dissipation on the target surface
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[0024] The present invention will be further described below in conjunction with accompanying drawing:
[0025] Such as figure 1 , 2 As shown, the rectangular planar cathodic arc evaporation source of the combined magnetic field of the present invention comprises a rectangular target plate 8, a cooling water tank plate 7, a magnetically conductive sheet 6, a magnetically conductive armature 2, a target base plate 1, a central axis permanent magnet 9, Four end angle permanent magnets 13, at least two oblong electromagnetic coils; the target base plate 1 supports the entire arc evaporation source, the target base plate 1 is provided with a magnetically conductive armature 2, and the magnetically conductive armature 2 faces one side of the target base plate 1 It is a plane, and the other side is convex and concave. Several grooves are provided on the upper surface of the magnetically conductive armature 2. The central axis permanent magnet 9, the end angle permanent magnet 13 an...
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