The invention relates to the technical field of semiconductors, in particular to a
wafer box loading device providing a
nitrogen protection environment and a using method thereof, and the
wafer box loading device is composed of a back plate, an
electrical control module, a driving module, a cover opening module, a
nitrogen protection cavity, a positioning
assembly, an unlocking
assembly, a cover pressing
assembly, a sealing ring and a sealing bag body. By arranging the
nitrogen protection cavity, a protection cavity can be formed between the nitrogen protection cavity and the back plate, and under the synergistic effect of the pressing block, the sealing ring, the sealing bag body, the air inlet and outlet assembly and the
nitrogen source, the sealing performance of the protection cavity formed between the nitrogen protection cavity and the back plate can be effectively improved; in addition, the nitrogen content in the protection cavity can be guaranteed, so that the protection cavity achieves a clean effect, a nitrogen protection environment is provided for the uncovered
wafer, the uncovered wafer is prevented from being influenced by the external environment, and the safety is improved.