Self-tilting micro electromechanical system micromirror

Abstract

The invention discloses a self-tilting micro electromechanical system micromirror, comprising a micromirror frame, a mirror body and a driving arm, wherein the mirror body is connected with the micromirror frame by virtue of the driving arm, the mirror body is driven to deflect and tilt by the driving arm, and the self-tilting micro electromechanical system micromirror has the characteristic that the driving arm causes the mirror body to be in a self-tilting state under the passive initial condition. A manufacturing method of the self-tilting micro electromechanical system micromirror is characterized in that the driving arm is formed by stacking up multiple materials with different thermal expansion coefficients, the driving arm is manufactured into a flat structure at production manufacturing temperature higher than room temperature, and after the driving arm is cooled to the room temperature and is released, the driving arm contracts toward one side with high thermal expansion rate. The initial structural state of the self-tilting micro electromechanical system micromirror disclosed by the invention tilts for certain angle, thus being convenient for alignment of a light path and mounting; the micromirror can implement self-tilt structure without special process; the center can be maintained to be fixed in a driving process; and the tilting angle of the self-tilting micro electromechanical system micromirror can be freely controlled according to a designed layout and the process.

Description

Technical field [0001] The invention belongs to the field of microelectromechanical systems (MEMS), and relates to the design and manufacture of a self-tilting microelectromechanical system micromirror structure. Background technique [0002] Miniaturization, high performance, low cost, and mass production are the pursuit goals of today's device manufacturing. MEMS technology came into being at this time and was widely used by equipment manufacturers. Devices manufactured using MEMS technology can be divided into two main categories. One is simply miniaturization of traditional devices, such as miniature optical platforms, whose advantages are concentrated in the expansion of the scope of use of miniaturized systems; the other is manufacturing using innovative principles Devices that cannot be made by traditional methods, such as geomagnetic sensors. [0003] MEMS devices rely on mature semiconductor production technology and use silicon and other materials as carriers to promote...

AI Technical Summary

Problems solved by technology

The disadvantage of this design method is that it cannot achieve self-tilting, and it always needs to be driven during the tilting process.

And some self-tilting structures cannot be driven freely, or the axis and symmetry point will shift during the driving process

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