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Fluid measurement system, device, method and device management method thereof

一种流体测量、设备管理的技术，应用在测量流量/质量流量、液体/流体固体测量、测量容量等方向，能够解决养护性差等问题，达到提高养护性的效果

Active Publication Date: 2012-07-11
HORIBA STEC CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, it is necessary to calibrate the flow measurement device on the production line, etc., and it is necessary to perform operations such as writing calibration data to the control device on the production line, etc., so there is a problem of poor maintenance.

Method used

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  • Fluid measurement system, device, method and device management method thereof
  • Fluid measurement system, device, method and device management method thereof
  • Fluid measurement system, device, method and device management method thereof

Examples

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Embodiment Construction

[0027] One embodiment of the flow measurement system of the present invention will be described below with reference to the drawings.

[0028]

[0029] Such as figure 1 As shown, the flow measurement system 100 of this embodiment, for example, is mounted on a gas panel and constitutes a part of a material supply line of a semiconductor manufacturing device. The flow measurement system 100 includes a plurality of flow measurement devices 2 and a control device 3. The control device 3 The plurality of flow measurement devices 2 are managed by sending and receiving data with the plurality of flow measurement devices 2 . In the flow measurement system 100 of this embodiment, the plurality of flow measurement devices 2 are arranged side by side in the thickness direction, and the control device 3 is arranged above the plurality of flow measurement devices 2 . Furthermore, the sum of the dimensions of the plurality of flow measurement devices 2 in the thickness direction is subst...

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Abstract

The invention provides a fluid measurement system, a device, a method and a device management method. The invention is to improve procedures of maintenance of a fluid measurement system having a fluid measurement device and a control device. The fluid measurement system (100) has a MFC (2) and a control device (3) to control the MFC (2), and the MFC (2) comprises a fluid sensor (21) and a related data store part (D1). The related data store part (D1) is used to store fluid calculation related data, the fluid calculation related data is used for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor (21), and the control device (3) obtains the fluid calculation related data from the related data store part (D1) and calculates the one or more fluid parameters with the measurement data of the fluid sensor (21) and the fluid calculation related data.

Description

technical field [0001] The present invention relates to a fluid measurement system having a fluid measurement device such as a mass flow controller and a control device managing the fluid measurement device. Background technique [0002] As shown in Patent Document 1, a conventional flow measurement system includes one or more flow measurement devices such as mass flow sensors and a control device for managing the flow measurement devices. In this flow measurement system, calibration data, calibration curve data, IDs of the flow measurement devices, codes for operating the flow measurement devices, and the like are stored in a memory provided in the control device. [0003] However, for a flow measurement system in which calibration data and the like are stored in the control device, when the flow measurement device is replaced due to a failure of the flow measurement device, etc., it is necessary to correspond to the flow measurement device and rewrite the replaced flow mea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/86G05D7/06
CPCG01F15/005G01F15/068G01F1/00G05D7/06
Inventor 松浦和宏高仓洋古川幸正安田忠弘
Owner HORIBA STEC CO LTD
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