High-voltage lead assembly for ultrahigh vacuum device and manufacture method thereof

A high-voltage lead wire, ultra-high vacuum technology, applied in the parts of connecting devices, coupling devices, circuit/collector parts, etc.

Inactive Publication Date: 2012-07-11
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among the selected materials, A-95 (95% Al 2 o 3 ceramics) and porcelain-sealed kovar alloy, but there are still some differences between different vacuum equipment manufacturers in terms of structural design and specific manufacturing processes

Method used

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  • High-voltage lead assembly for ultrahigh vacuum device and manufacture method thereof
  • High-voltage lead assembly for ultrahigh vacuum device and manufacture method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0050] 1. Press figure 1 Process or purchase 95% alumina insulating porcelain parts for the structure shown 4. The specific structural dimensions are as follows: φ1 = 6.5mmm, φ2 = 4mm, φ3 = 4.5mm, φ 孔 =0.8mm, h1=h2=1.2mm, h3=2.5mm, H1=10.9mm, H2=10mm, d=1mm.

[0051] 2. Using stamping process, press figure 1 The shown structure processes the first porcelain sealing alloy part 1 and the second porcelain sealing alloy part 5 (both are 4J33), and the part thickness (δ) is taken as 0.3mm. Wherein the diameter of the central hole of the first porcelain sealing alloy part 1 is 0.65mm, and the outer diameter is consistent with φ3.

[0052] 3. The metal lead 7 is made of φ0.6mm nickel wire, which has been cleaned and annealed

[0053] 4. Carry out metallization, nickel plating, and hydrogen burning treatment on the sealing surfaces 2 and 3 of the porcelain parts according to the flat sealing structure.

[0054] 5. Clean, nickel-plate and burn hydrogen on the ceramic seal alloy pa...

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Abstract

The invention discloses a high-voltage lead assembly for an ultrahigh vacuum device and a manufacture method thereof, which relate to vacuum electronic technology. The high-voltage lead assembly comprises a metal lead, insulation porcelain, ceramic sealing alloy and a lead flange. The high-voltage lead assembly has the advantages of being high in structure strength, compact in size, good in voltage withstanding effect and favorable for improving reliability and high voltage application range of the ultrahigh vacuum device. The structure design, the materials, the manufacture process and the like of the high-voltage lead assembly are provided.

Description

technical field [0001] The invention relates to the technical field of vacuum and vacuum electronics, in particular to a high-voltage lead assembly for an ultra-high vacuum device and a manufacturing method. Background technique [0002] Vacuum devices and technologies have applications in many fields and have therefore been extensively and intensively studied [Ref: W. Umrath, Fundamentals of Vacuum Technology, Cologne (Germany), 1998]. Electrode leads are often used in these devices, one end of which is connected to the electrode in the vacuum, and the other end is drawn out to the atmosphere and connected to a high-voltage power supply. The electrode lead assembly is made of insulating ceramics, ceramic sealing alloy and metal lead wires. In addition to meeting the requirements of vacuum airtightness, the most important thing is to be able to withstand high voltages ranging from thousands to tens of thousands of volts without damage. . [0003] In practice, sometimes due...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01R13/02H01R13/40H01R13/502H01R13/52H01R43/00
Inventor 赵世柯樊会明苏小保肖东梅
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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