Power supply control device for polycrystalline silicon reduction furnace

Abstract

The invention discloses a power supply control device for a polycrystalline silicon reduction furnace, which comprises a voltage current module, a temperature sensing module, a digital filtering module, a phase tracking module, an input and output module, a control module, a light triggering module, a field bus module, a thyristor driving module and an HMI (Human Machine Interface) module. The voltage current module changes high voltages and large currents on silicon rods into analog signals of less than 5V; the temperature sensing module changes temperatures of the silicon rods of the original furnace into analog signals of less than 5V; high-frequency interference signals are filtered from the analog signals by the digital filtering module and the sampling is carried out to generate digital signals which can be identified by a computer; the control module implements a control strategy according to the digital signals; the control on the currents of the silicon rods and the conversion of a connection method are implemented by the light triggering module or the input and output module; and the thyristor driving module can directly drive a high voltage primary part and is isolated by optical fibers and a lowe voltage part. The invention solves the unbalance problem of a parallel loop of the power supply control device for the reduction furnace.

Description

technical field [0001] The invention relates to a control device for a power supply control system of a polysilicon reduction furnace, in particular to a control device with more than 36 pairs of silicon rods for a polysilicon reduction power supply. Background technique [0002] Polysilicon is the most basic raw material for information and solar energy industries. The polysilicon reduction furnace power control device is a very important technical equipment in the polysilicon production process, and it completes the production process from trichlorosilane to polysilicon. The polysilicon reduction furnace mainly has 24 pairs of rods, 36 pairs of rods and 40 pairs of rods in terms of production methods. [0003] The function of the power controller of the polysilicon reduction furnace is to control the thyristor and the relay during the whole production process, provide suitable voltage and current to heat the silicon rods, keep the surface temperature of the silicon rods c...

AI Technical Summary

Problems solved by technology

[0008] the above figure 1 The control loop requires two sets of control devices; figure 2 When two groups of silicon rods are connected in parallel, due to the inconsistency of the resistance characteristics leading to shunting, the silicon rods with small resistance value can often grow, and the silicon rods with large resistance value cannot continue to grow, the yield is reduced, or the balance is increased in the primary high-voltage part Reactors are used to ensure the simultaneous growth of two sets of silicon rods; the cost of PLC is very high, and the control current is transmitted with the controller through an external bus, and its real-time performance and anti-interference performance are inferior to those of the internal board-level bus

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