Detection method of metal nanometer film thickness

Abstract

The invention provides a detection method of metal nanometer film thickness. The detection method includes detecting resistance value of the metal nanometer film to be detected; and according to the resistance value and a pre-established standard curve of the thickness of the metal nanometer film and the resistance value of the metal nanometer film, obtaining the thickness of the metal nanometer film through calculating, wherein the standard curve is a curve between logarithms of the resistance value of the metal nanometer film and reciprocals of the metal nanometer film thickness. According to the detection method, a good linearity exists between the resistance value of the metal nanometer film and the reciprocals of the metal nanometer film thickness, so that the standard curve between the metal nanometer film thickness and the resistance value is obtained; the thickness of the metal nanometer film can be obtained according to the standard curve and the resistance value of the metal nanometer film; and no complex operation process is required for detecting the metal nanometer film thickness, the detection method is simple and convenient, the detection speed is high, and the cost is low.

Description

technical field [0001] The invention relates to the technical field of nanometer materials, in particular to a method for detecting the thickness of a metal nanometer film. Background technique [0002] In the 21st century, due to the rapid development of information, biotechnology, energy, environment, national defense and other industries, newer and higher requirements are put forward for material performance, miniaturization, intelligence, high integration, high-density storage and ultra-fast transmission of components, etc. The size of materials is required to be smaller and smaller, and aerospace, new military equipment and trap manufacturing technology make the performance of materials extreme. Therefore, the research and innovation of new materials must be an important topic and development basis for future scientific research. Due to the special physical and chemical properties of nanomaterials, as well as the resulting special application value, it has become a hot ...

AI Technical Summary

Problems solved by technology

The thickness of the nano-film has a great influence on its surface morphology and its conductivity, which in turn will affect its application

A variety of methods for detecting the thickness of metal nano-films are disclosed in the prior art. For example, according to the empirical rule that the thickness of the coating film increases linearly with the coating time, the thickness of the metal nano-film is calculated according to the coating time. Since the conditions of each coating film cannot Exactly the same, cause the rate of coating film to change, thereby do not conform to its linear law, make the detection result that this method obtains unreliable; The film thickness sensor method, however, after a period of use of the quartz crystal oscillator film thickness sensor, its surface will be covered with metal, which reduces the sensitivity and accuracy of detection; in order to make up for the shortcomings of the quartz crystal oscillator film thickness sensor method, the existing technology Scanning probe microscopy is disclosed for measuring the thickness of metal thin films. This scanning probe microscopy can detect the thickness of accurate metal nano-films. However, this technique requires that the metal nano-films to be tested have sharp Edge, and the instrument used atomic force microscope is expensive and complicated to operate, which is not conducive to its wide application

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