Method for producing magnetic recording medium, and magnetic recording and reproducing device
A technology of a magnetic recording medium and a manufacturing method, which is applied in the field of the manufacture of the magnetic recording medium and the magnetic recording and reproducing device, can solve the problems of unstable floating height and the like, and achieve the effect of improving the electromagnetic conversion characteristics
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[0142] In Example 1, first, the vacuum chamber in which the glass substrate for HD was placed was pre-evacuated to 1.0×10 -5 Below Pa. The glass substrate used here to incorporate Li 2 Si 2 o 5 、Al 2 o 3 -K 2 O, MgO-P 2 o 5 , Sb 2 o 3 -Crystalized glass as a constituent of ZnO is used as a material, with an outer diameter of 65 mm, an inner diameter of 20 mm, and an average surface roughness (Ra) of 2 angstroms (unit: 0.2nm).
[0143] Next, on this glass substrate, employing DC sputtering method to laminate sequentially: the FeCoB film that layer thickness is 60nm as soft magnetic layer, the Ru film that layer thickness is 10nm as intermediate layer, layer thickness as recording magnetic layer is 15nm 70Co-5Cr-15Pt-10SiO 2 An alloy film, a 70Co-5Cr-15Pt alloy film with a layer thickness of 14 nm, a polysiloxane film as a dissolution layer, a Mo layer with a layer thickness of 5 nm, and a carbon film with a layer thickness of 30 nm as a mask layer.
[0144] Howeve...
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