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A kind of tft array substrate and its manufacturing method and liquid crystal display

A technology for array substrates and substrates, applied in semiconductor/solid-state device manufacturing, instruments, transistors, etc., can solve problems such as increasing production costs and reducing production efficiency of TFT array substrates, so as to improve production efficiency, reduce patterning processes, and reduce production costs Effect

Active Publication Date: 2016-06-01
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this way, a patterning process is added when making the protective layer, thereby reducing the production efficiency of the TFT array substrate and increasing the production cost

Method used

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  • A kind of tft array substrate and its manufacturing method and liquid crystal display
  • A kind of tft array substrate and its manufacturing method and liquid crystal display
  • A kind of tft array substrate and its manufacturing method and liquid crystal display

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Embodiment Construction

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0041] The TFT array substrate provided by the embodiment of the present invention, such as figure 1 shown, including:

[0042] Substrate 11; Gate line (not shown in the figure), gate 12, gate insulating layer 13 and semiconductor active layer 14 are formed on the substrate 11; The metal barrier layer 15 of the metal oxide region 151; the source electrode 161 and the drain electrode 162 are formed on the metal barrier layer 15; wherein, the metal oxide region...

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Abstract

Embodiments of the present invention provide a TFT array substrate and a manufacturing method thereof and a liquid crystal display, which relate to the field of liquid crystal panel manufacturing. While preventing the semiconductor active layer from being contaminated, the patterning process is reduced, the production efficiency is improved, and the production cost is reduced. . The TFT array substrate includes: a substrate, a gate line, a gate electrode, a gate insulating layer and a semiconductor active layer formed on the substrate, a metal barrier layer with a metal oxide region, a source electrode and a drain electrode formed on the metal barrier layer, and a metal barrier layer. The metal oxide region of the layer is located between the source electrode and the drain electrode. A protective layer and a pixel electrode connected to the drain electrode are formed on the substrate, the source electrode and the drain electrode. Embodiments of the present invention are used to manufacture TFT array substrates.

Description

technical field [0001] The invention relates to the field of liquid crystal panel manufacture, in particular to a TFT array substrate of a thin film transistor liquid crystal display (TFT-LCD), a manufacturing method thereof, and a liquid crystal display. Background technique [0002] TFT-LCD (ThinFilmTransistor-LiquidCrystalDisplay, Thin Film Field Effect Transistor Liquid Crystal Display) uses the change of the electric field strength set on the liquid crystal layer to change the degree of rotation of liquid crystal molecules, thereby controlling the intensity of light transmission to display images. Generally speaking, a complete liquid crystal display panel must have a backlight module, a polarizer, a color filter substrate and a TFT array substrate, and a layer of liquid crystal molecules added between the color filter substrate and the TFT array substrate. [0003] In recent years, TFT-LCD has achieved rapid development. With the continuous increase of TFT-LCD size and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L29/786H01L27/02H01L21/77G02F1/1362G02F1/1368
CPCG02F1/1362H01L29/41733H01L29/458H01L29/66765H01L27/1288H01L27/124G02F1/136218G02F1/136236G02F1/136286H01L21/44H01L21/4885H01L27/1259H01L27/156
Inventor 刘翔薛建设
Owner BOE TECH GRP CO LTD