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Method and device for spatially resolved input of an intensity pattern of electromagnetic radiation into a photosensitive substance and use thereof

An electromagnetic radiation and spatial resolution technology, which is applied in electromechanical devices, transportation and packaging, and printing devices, can solve problems such as projection distortion and disadvantages, and achieve the effect of high spatial resolution

Active Publication Date: 2016-01-20
NANOSCRIBE HLDG GMBH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, the compensated projection is distorted or compressed (gestaucht) due to the displacement of the tube lens projection along the optical axis
In some cases, in the compensated projection, the incoming exposure can also change, which can have a detrimental effect on the final structure

Method used

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  • Method and device for spatially resolved input of an intensity pattern of electromagnetic radiation into a photosensitive substance and use thereof
  • Method and device for spatially resolved input of an intensity pattern of electromagnetic radiation into a photosensitive substance and use thereof
  • Method and device for spatially resolved input of an intensity pattern of electromagnetic radiation into a photosensitive substance and use thereof

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Embodiment Construction

[0035] figure 1 A schematic diagram showing the core idea of ​​the invention. A liquid photosensitive substance 2 is provided on a substrate 1, said photosensitive site being formed here by a liquid photosensitive lacquer system known from photolithography, which has a concentration of n˜1.3 and n˜1.7 between the refractive indices. A (not shown) light source, here a laser in the near-infrared range, is projected into the photosensitive substance 2 by means of an optical imaging system with an objective 3, such as a microscope, and focused on a focal point 5 in a graphic plane 8, so that in A change in the properties of the photosensitive substance 2 is brought about in the region of the focal point 5 , this projection being represented here by light rays 4 . The light rays 4 emerge from an objective lens surface 6 of the objective 3 , wherein according to the invention this surface 5 is immersed in the photosensitive substance 2 in order to avoid possible interfaces between...

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Abstract

The invention relates to a method for the spatially resolved introduction of an intensity pattern consisting of electromagnetic radiation into a photosensitive substance (2) having properties that can be changed by photon irradiation by means of an optical imaging system. These properties include a first state of liquid state and at least one second state, wherein electromagnetic radiation (4) is introduced into said photosensitive substance (2) by said optical imaging system (3) and projected there onto predetermined positional coordinates , so as to create a change in the properties of the substance at these position coordinates or in the region surrounding said position coordinates. For this purpose, the surface (6) of the objective lens of the imaging optics (3) is immersed in the liquid photosensitive substance (2), through which surface the electromagnetic radiation emerges from the imaging optics. The subject matter of the invention is also a device for carrying out the method and its use for forming microscale or nanoscale structures.

Description

technical field [0001] The invention relates to a method for the spatially resolved introduction of an intensity pattern of electromagnetic radiation into a photosensitive (light-sensitive) substance having properties that can be changed by photon irradiation, as well as a device for carrying out the method. The invention finds particular application in the writing, erasing and rewriting of optical data memories, as well as in the formation of micro (meter) scale and nanoscale structures. Said use or use is also a subject of the present invention. [0002] The substances employed within the scope of the invention have as an initial state a liquid first state and whose properties can be changed by photon irradiation into at least one second state. This property change is achieved by passing electromagnetic radiation into the substance by means of an optical imaging system, where it is imaged / projected onto a predetermined position coordinate so that at or around the position c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B29C67/00
CPCB29C64/135B29C64/124B29C64/264B33Y30/00F01P1/06F01P3/18F01P5/02F01P5/06F01P11/10F01P11/12F01P2005/046G03F7/70341G03F7/70416H02K7/14H02K9/02H02K9/06H02K11/00H02K11/33G03F7/0045G03B27/42
Inventor 迈克尔·蒂尔H·费舍尔
Owner NANOSCRIBE HLDG GMBH
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