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Method and device for location-triggered application of an intensity pattern from electromagnetic radiation to a photosensitive substance and applications of same

A technology of electromagnetic radiation and spatial resolution, applied in electromechanical devices, transportation and packaging, printing devices, etc., can solve the problems of projection distortion and disadvantage, and achieve the effect of high spatial resolution

Active Publication Date: 2012-08-29
NANOSCRIBE HLDG GMBH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the compensated projection is distorted or compressed (gestaucht) due to the displacement of the tube lens projection along the optical axis
In some cases, in the compensated projection, the incoming exposure can also change, which can have a detrimental effect on the final structure

Method used

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  • Method and device for location-triggered application of an intensity pattern from electromagnetic radiation to a photosensitive substance and applications of same
  • Method and device for location-triggered application of an intensity pattern from electromagnetic radiation to a photosensitive substance and applications of same
  • Method and device for location-triggered application of an intensity pattern from electromagnetic radiation to a photosensitive substance and applications of same

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Embodiment Construction

[0035] figure 1 A schematic diagram showing the core idea of ​​the invention. A liquid photosensitive substance 2 is provided on a substrate 1, said photosensitive site being formed here by a liquid photosensitive lacquer system known from photolithography, which has a concentration of n˜1.3 and n˜1.7 between the refractive indices. A (not shown) light source, here a laser in the near-infrared range, is projected into the photosensitive substance 2 by means of an optical imaging system with an objective 3, such as a microscope, and focused on a focal point 5 in a graphic plane 8, so that in A change in the properties of the photosensitive substance 2 is brought about in the region of the focal point 5 , this projection being represented here by light rays 4 . The light rays 4 emerge from an objective lens surface 6 of the objective 3 , wherein according to the invention this surface 5 is immersed in the photosensitive substance 2 in order to avoid possible interfaces between...

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PUM

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Abstract

The invention refers to a method for the spatially resolved introduction of an intensity pattern of electro-magnetic radiation by optic display system into a photosensitive substance (2) having properties which can be changed by photon exposure. These properties include a first, liquid and at least one second state, with the electro-magnetic radiation (4) being conducted via the optic display system (3) into the photosensitive substance and here being projected on predetermined spatial coordinates, in order to create at or in an area of these spatial coordinates a change of the properties of the substance. A surface (6) of an objective lens of the optic display system, through which the electro-magnetic radiation 4 is emitted, is immersed in the liquid photosensitive substance 2. A corresponding device is provided, and the device and method can be used for the creation of micro or nano-scaled structures.

Description

technical field [0001] The invention relates to a method according to the preamble of claim 1 for the spatially resolved introduction of an intensity pattern consisting of electromagnetic radiation into a light-sensitive (light-sensitive) substance having properties that can be changed by photon irradiation, and a Device for carrying out such a method according to the preamble of claim 12 . The invention finds particular application in the writing, erasing and rewriting of optical data memories, as well as in the formation of micro (meter) scale and nanoscale structures. Said use or use is also a subject of the present invention. [0002] The substances employed within the scope of the invention have as an initial state a liquid first state and whose properties can be changed by photon irradiation into at least one second state. This property change is achieved by passing electromagnetic radiation into the substance by means of an optical imaging system, where it is imaged / p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B29C67/04B23K26/00
CPCB29C64/135B29C64/124B29C64/264B33Y30/00F01P1/06F01P3/18F01P5/02F01P5/06F01P11/10F01P11/12F01P2005/046G03F7/70341G03F7/70416H02K7/14H02K9/02H02K9/06H02K11/00H02K11/33G03F7/0045G03B27/42
Inventor 迈克尔·蒂尔H·费舍尔
Owner NANOSCRIBE HLDG GMBH
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