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Ink-jet head and ink-jet recording apparatus

A technology of inkjet head and nozzle plate, applied in the direction of inking device, printing, etc., can solve the problems that the inkjet head components cannot be significantly dense, and the size of the inkjet head cannot be significantly reduced.

Active Publication Date: 2012-08-29
RICOH KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, under such configuration, the size of the inkjet head may not be significantly reduced or the components of the inkjet head may not be significantly dense

Method used

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  • Ink-jet head and ink-jet recording apparatus
  • Ink-jet head and ink-jet recording apparatus
  • Ink-jet head and ink-jet recording apparatus

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0084] A thermally oxidized film having a film thickness of 1 µm was formed as a vibrating plate on a silicon wafer having a (100) crystal plane as a main surface. Then, a titanium film having a film thickness of 50 nm, a platinum film having a film thickness of 200 nm, and a SrRuO film having a film thickness of 100 nm were deposited on the thermal oxide film formed on the silicon wafer by a sputtering method.

[0085] Then, coating the PZT precursor solution on the obtained layered product, drying the PZT precursor solution-coated layered product at 120° C., and demarcating the dried layered product at a high temperature of 500° C. were repeated three times. No defects such as cracks were observed on the surface of the obtained film. The obtained d-film was subjected to rapid thermal annealing (RTA) at 700° C. to thermally crystallize it. This RTA was repeated four times to obtain Pb(Zr 0.53 Ti 0.47 )O 3 membrane.

[0086]Next, a layered product formed of a SrRuO film w...

example 2

[0094] An inkjet head was manufactured in the same manner as in Example 1 except that the film thickness of the ZrO film (ie, second insulating film 132 ) was changed to 100 nm. The film thickness of the region of the second insulating film 132 on which the third insulating film 133 is not formed (ie, the second region) is 9 nm.

example 3

[0096] The inkjet head was fabricated in the same manner as in Example 1, except that Al 2 o 3 The film thickness of the film (ie, the first insulating film 131 ) becomes 20 nm. The film thickness of the region of the second insulating film 132 on which the third insulating film 133 is not formed (ie, the second region) is 25 nm.

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PUM

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Abstract

The invention discloses an ink-jet head and an ink-jet recording apparatus. The ink-jet head includes a nozzle plate having nozzles, a vibrating plate on the nozzle plate, liquid chambers formed of spaces partitioned by division walls, a piezoelectric element having a common electrode, a piezoelectric body and an individual electrode layered in this order on a surface of the vibrating plate, a first insulator film having a first opening and a second insulator film having a second opening layered in this order on the first surface, a first wire drawn from the individual electrode via the first opening and the second opening, a third insulator film having a third opening on the first wire; and a second wire drawn via the third opening, where the third insulator film is formed in a first region of the second insulator film and is not formed in a second region excluding a region including the first wire formed above the liquid chamber.

Description

technical field [0001] The present application generally relates to an inkjet head and an inkjet recording device. Background technique [0002] An applied micro-electromechanical system (MEMS) is known in the art as a technique for densifying an inkjet head (droplet mode inkjet head) using a piezoelectric element. Such an inkjet head may be formed in an actuating structure composed of piezoelectric elements formed by patterning individual electrodes, common electrodes, and piezoelectric bodies formed on a vibrating plate. [0003] However, the piezoelectric element generally has electrical properties deteriorated by moisture in the air. Japanese Patent Application Laid-Open Specification No. 2010-42683 (hereinafter referred to as "Patent Document 1") discloses an inkjet head having a structure in which layers for piezoelectric elements and layers for upper electrodes are formed. The lead electrode is covered by an insulating film formed of an amorphous inorganic material,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B41J2/01
CPCB41J2/14233B41J2002/14491B41J2202/08B41J2/14072B41J2/1408B41J2/14129
Inventor 水上智加藤将纪黑田隆彦秋山善一阿部贯思
Owner RICOH KK
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