Imaging method and device for inducing surface thermal deformation effect based on laser array

Abstract

The invention discloses an imaging method and an imaging device for inducing a surface thermal deformation effect based on a laser array. The method comprises the following steps of: dividing pump light into pump light beam groups which have equal light intensity and are distributed in an array mode at equal intervals, and irradiating the surface of a sample to be detected by using the pump light beam groups to induce the local surface deformation of the sample to be detected; dividing detection light into detection light beam groups which have equal light intensity and are distributed in an array mode at equal intervals, and irradiating the surface of the sample to be detected by using the detection light beam groups, wherein each detection light beam is correspondingly overlapped with one pump light beam; and ensuring that the detection light beam groups which are emergent from the sample to be detected finally enter a photoelectric detector, and acquiring a two-dimensional image about the surface characteristic of a material by measuring the change of the propagation characteristic of the detection light beams, which is caused by surface thermal deformation. Imaging speed can be greatly improved compared with that of the traditional point-by-point sample scanning method; and in addition, point-by-point scanning is not needed, so that moving parts can be avoided in a specific detection and imaging instrument design, the stability of an instrument is improved, cost is reduced, the instrument is further miniaturized, and the application field is broadened.

Description

[0001] technical field [0002] The invention relates to the technical field of photothermal detection, in particular to an imaging method and device based on a laser array-induced surface thermal deformation effect. Background technique [0003] The basic principle of using laser-induced surface thermal deformation effect for detection is based on the fact that the surface of the material absorbs light energy and causes local temperature rise under the action of light (hereinafter referred to as pump light), thereby causing deformation. The spatial distribution of this thermal deformation and its variation with time are closely related to the pump light parameters and material properties. Moreover, due to this thermal deformation of the surface, the propagation characteristics of the light reflected from the surface of the material will change, producing a converging or diverging effect, just like adding a new lens. Therefore, this surface thermal deformation effect is als...

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Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide an imaging method and device based on the thermal deformation effect of the surface induced by a laser array, so as to solve the problem that point-by-point scanning is required in the two-dimensional imaging process using the thermal lens effect on the surface, which takes too long

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