Fluidized bed reactor

Abstract

A fluidized bed reactor is disclosed. The fluidized bed reactor includes a reaction pipe comprising silicon particles provided therein; and a reaction gas supply unit configured to supply reaction gas comprising silicon elements to an internal space of the reaction pipe along a reaction gas channel, and wherein inert gas flows in the reaction gas channel.

Description

technical field [0001] The present invention relates to fluidized bed reactors. Background technique [0002] High-purity polysilicon is widely used as a material that can be used in semiconductor devices and solar cells. To produce such polysilicon, a silicon precipitation method is used, in which silicon is deposited by thermal decomposition and hydrogen reduction reaction of a silicon-containing reaction gas. [0003] For mass production of polysilicon, fluidized bed reactors larger in size and height than those used in laboratories are required. Therefore, the fluidized bed reactor capable of producing polysilicon in batches is very heavy and has a large volume, which makes assembly, installation and maintenance of the fluidized bed reactor difficult. [0004] Therefore, research is in full swing for a fluidized bed reactor that is easy to assemble, install and maintain, and can produce polysilicon in large quantities. [0005] Such a fluidized bed reactor should stab...

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Problems solved by technology

Therefore, the fluidized bed reactor capable of producing polysilicon in batches is very heavy and bulky, which makes it difficult to assemble, install and maintain the fluidized bed reactor

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