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Coil section assembly for simulating circular coils for vacuum devices

A coil and equipment technology, applied in the field of magnetic systems, can solve problems such as large coil thickness

Active Publication Date: 2012-11-07
OERLIKON SURFACE SOLUTIONS AG PFAFFIKON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, space must be provided for this turned-down part again in the area of ​​loading and unloading, for which it must be noted that the coils to be used here have an extremely high thickness

Method used

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  • Coil section assembly for simulating circular coils for vacuum devices
  • Coil section assembly for simulating circular coils for vacuum devices
  • Coil section assembly for simulating circular coils for vacuum devices

Examples

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Embodiment Construction

[0012] The invention will now be described more precisely in detail and on the basis of various embodiments with the aid of the drawings.

[0013] image 3 A perspective view of a stand for a single-door vacuum processing plant with a first embodiment of the coil structure according to the invention is shown. In the region below, the first part of the coil, which is mounted below to the door, and the second part of the coil, which are mounted below the rest of the device, are clearly visible.

[0014] Figure 4a and 4b An embodiment is shown representing a partial section of a coating plant named Oerlikon Balzers RS 90 and modified according to the invention. The device has two doors: one for substrate loading and one for machine maintenance. A circular coil substantially corresponding to the circumference of the chamber is simulated in this embodiment by three individual coils whose common circumference forms a circle. Figure 4a A perspective side view showing a partial...

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PUM

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Abstract

The invention relates to a vacuum treatment chamber, comprising a coil arrangement for generating a magnetic field in the chamber, wherein the coil assembly comprises at least one first coil section and a second coil section. The first coil section and the second coil section are disposed in cross-section side by side, preferably in one plane, such that at least a partial section of the first coil substantially follows the course of a partial section of the second coil, wherein the spacing of the first partial section from the second partial section is at least one order of magnitude smaller than the cross-section of the optionally smaller coil section.

Description

technical field [0001] The invention relates to a magnetic system of a vacuum apparatus according to the preamble of claim 1 . The invention relates in particular to a coating plant with a magnetic system for controlling the properties of the plasma. Background technique [0002] To control the plasma properties in coating plants, magnetic systems for generating magnetic fields are also used. The magnetic field lines and the magnetic field strength are here distributed as uniformly as economically feasible in the coating space or on the substrate. An important method for generating a magnetic field is the arrangement of coils, especially in Helmholtz arrangements. Especially in large batch plants with front loading, e.g. in Helmholtz installations, it is structurally very difficult to actually place the coil, since the coil protrudes when the door is opened and lies in the path during loading and unloading middle. [0003] One possibility of getting around this difficult...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/32H01L21/00
CPCH01L21/67201H01J37/32431H01J37/32
Inventor S·克拉斯尼策尔
Owner OERLIKON SURFACE SOLUTIONS AG PFAFFIKON