Water-cooled electric discharge lamp unit
A discharge lamp, water-cooled technology, applied in the field of water-cooled discharge lamp unit, can solve problems such as detachment, loss of water tightness, loss of inhibition, etc., and achieve the effect of maintaining installation
Inactive Publication Date: 2012-11-21
USHIO DENKI KK
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Problems solved by technology
[0018] Due to the ultraviolet rays, the wall surface 9a of the holding block 9 will be deteriorated, and it will be gradually cut off by the cooling water W flowing through the water-cooled pipe 10, as shown in FIG. Image 6 (B), finally causing partial peeling or detachment
[0019] If partial dissection or detachment occurs, such as Image 6 As shown in (C), the restraining force in the direction of the tube axis of the water-cooled tube 10 will be lost, and the water-cooled tube 10 will move in the flow direction due to the cooling water W. Loss, cooling water leakage problem
Method used
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[0036] figure 1 Is a partial cross-sectional view of the water-cooled discharge lamp unit of the present invention, figure 2 Yes figure 1 An enlarged cross-sectional view of part A.
[0037] The overall basic structure of the water-cooled discharge lamp unit 1 of the present invention is the same as the above Figure 5 The existing example shown is the same. Hereinafter, the description will focus on the differences.
[0038] The high pressure discharge lamp 2 is composed of a discharge tube 3 and an outer tube 4 covering and fitting the outer circumference of the discharge tube 3, and a resin holding block 9 is attached to the end of the discharge tube. More specifically, the end of the outer tube 3 is inserted into the holding block 9 and held in a watertight state by a sealing material 17 such as an O-ring.
[0039] Furthermore, the fitting water cooling tube 10 is covered on the high pressure discharge lamp 2, and a cooling water flow path 11 is formed between them. The end o...
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The invention provides a water-cooled electric discharge lamp unit. The outer circumference of a high-pressure discharge lamp whose outer pipe covers and is embedded in an electric discharge pipe is provided with two ends of the high-pressure discharge lamp of a water-cooled tube. A retaining block capable of free mounting and dismounting is provided. Even if the retaining block is made from resins, the retaining block will not radiate ultraviolet rays from the end part of the water-cooled tube to degrade a wall face of the retaining block. The retaining block is made from resins. The end part of the water-cooled tube, opposite to the wall face of the retaining block is provided with an ultraviolet rays shielding component.
Description
Technical field [0001] This invention relates to a water-cooled discharge lamp unit used in an exposure device used for photochemical reaction devices or semiconductors and liquid crystal substrates used for hardening treatment of paint or resin, and particularly relates to the use of a discharge tube and a discharge tube inserted therein. A water-cooled discharge lamp unit in which a high-pressure discharge lamp composed of an outer tube performs indirect water cooling. Background technique [0002] Conventionally, long arc type high pressure discharge lamps have been used as the ultraviolet irradiation light source of the photochemical reaction device for the drying of ink or paint and the curing treatment of resin, and the ultraviolet irradiation light source of the exposure device for exposing semiconductor substrates or liquid crystal substrates for liquid crystal displays. . In this type of lamp, a water-cooled high pressure discharge lamp is used in order to prevent damag...
Claims
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IPC IPC(8): H01J61/52
Inventor 柳生英昭森和之
Owner USHIO DENKI KK