Film coating bearing frame
A carrier and tray technology, applied in the direction of sputtering plating, ion implantation plating, vacuum evaporation plating, etc., can solve the problems of inconsistent film characteristics, time-consuming, and inability to maintain completely consistent environmental parameters, etc., to reduce The number of times of heating and vacuuming, and the effect of shortening the coating time
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[0013] See figure 1 , Is a coating carrier 100 provided by an embodiment of the present invention, which is used to carry a plurality of parts to be coated. The coating carrier 100 includes a base 10, a tray 30, a turning assembly 50 and a controller 60.
[0014] Such as figure 2 and image 3 As shown, the base 10 includes a disc-shaped outer frame 11, a disc-shaped inner frame 13 and a rotating assembly 15.
[0015] The outer frame 11 is fixed in a coating cavity (not shown). The outer frame 11 defines a first through hole 110 with its own circle center as the axis to form a circular inner side wall 111. The inner side wall 111 defines an accommodation groove 112 along its own circumferential direction. The containing groove 112 includes an annular upper surface 113 and an annular lower surface 114 opposite to the upper surface 113.
[0016] The radius of the inner frame 13 is equal to the inner diameter of the first through hole 110, so that the inner frame 13 can be accommodat...
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