Precise micro motion platform based on shape memory material coarse motion driver

A technology of micro-motion platform and memory material, which is applied in the field of micro-motion platform, can solve the problems of low positioning accuracy, cumbersome control process, and complex structure, and achieve the effects of high positioning accuracy, wide application prospects, and large output displacement

Inactive Publication Date: 2013-02-13
HEILONGJIANG UNIVERSITY OF SCIENCE AND TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, at present, the coarse motion drive of the micro-motion platform mostly adopts the traditional mechanical transmission device, the structure is complex, the control process is cumbersome, and the positioning accuracy is low.

Method used

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  • Precise micro motion platform based on shape memory material coarse motion driver
  • Precise micro motion platform based on shape memory material coarse motion driver
  • Precise micro motion platform based on shape memory material coarse motion driver

Examples

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Embodiment Construction

[0011] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. A precision micro-motion platform based on a shape-memory material coarse motion driver. The stage 21 is fixed on the upper end surface of the Y-direction micro-motion platform 11 through the stage mounting bolts 10. The Y-direction micro-motion platform 11 passes four A Y direction micro-motion flexible hinge mechanism 9 is installed in the inside of X direction micro-motion platform 7; Y direction piezoelectric micro-driver 19 is installed in the drive groove of X direction micro-motion platform 7, and its two ends are connected with Y direction micro-motion platform respectively The moving platform 11 is in contact with the X-direction micro-movement platform 7; the X-direction micro-motion platform 7 is installed inside the base 12 of the XY two-dimensional micro-motion platform through four X-direction micro-movement flexible hinge mechanisms 20, and...

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Abstract

The invention discloses a precise micro motion platform based on a shape memory material coarse motion driver, belonging to a micro motion platform technology. A Y-directional coarse motion platform base, an X-directional coarse motion platform base, an X-directional coarse motion platform, an XY two-dimensional micro motion platform base, a Y-directional micro motion platform and an objective table are mounted on a base from bottom to top; the Y-directional micro motion platform is mounted in the X-directional micro motion platform through a Y-directional micro motion flexible articulated mechanism; the X-directional micro motion platform is mounted in the XY two-dimensional micro motion platform base through an X-directional micro motion flexible articulated mechanism and is driven by an X-directional piezoelectric micro motion driver and a Y-directional piezoelectric micro motion driver; and the X-directional coarse motion platform is matched with the X-directional coarse motion platform base through an X-directional coarse motion slide way and is driven by an X-directional shape memory material coarse motion driver and a Y-directional shape memory material coarse motion driver. The precise micro motion platform is simple and compact in structure, high in positioning precision and wide in application prospect and is easy to control.

Description

technical field [0001] The invention belongs to the micro-motion platform technology, and mainly relates to a precision micro-motion platform driven by shape memory materials. Background technique [0002] Precision displacement technology occupies an extremely important position in modern cutting-edge industrial production and scientific research fields, and is widely used in fields requiring fine operations such as micro-feeding, optical fiber docking, and precision and ultra-precision machining. The precise displacement is realized by the drive of the precision micro-motion platform driven by the driver. The micro-motion drive of the micro-motion platform mostly uses a piezoelectric driver. The piezoelectric driver is a new type of micro-displacement device developed in recent years. It has small size, large driving force, The advantages of high resolution, easy control and small output displacement have been widely used as drive components in precision machinery. Howeve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23Q1/34
Inventor 于月民张斌丁元柱
Owner HEILONGJIANG UNIVERSITY OF SCIENCE AND TECHNOLOGY
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