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Simultaneous polarization phase-shifting interferometer

A phase-shifting interference and polarization technology, which is applied in the direction of instruments, measuring devices, and optical devices, can solve the problems of low spatial resolution, high cost, and low measurement accuracy, and achieve the effect of simple optical system structure

Inactive Publication Date: 2013-02-27
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The present invention solves the technical problems of low spatial resolution, low measurement accuracy and high cost in the instantaneous phase shift interference method in the prior art, and provides a synchronous polarization phase shift with high spatial resolution, good measurement accuracy and low cost Interferometer

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Embodiment Construction

[0024] The inventive idea of ​​the present invention is: the synchronous polarization phase-shifting interferometer of the present invention adopts a laser as a linearly polarized coherent light source, splits the beams through the main polarization beam splitter prism, and generates P light and S light respectively directed to the standard surface and the inspected surface; again After reflection, carrying the surface information, the beams are combined by the main polarizing beam splitter, and then split by the wave plate and the depolarizing beam splitting prism, respectively, through the beam splitting of the prism with a certain spatial position relationship to generate 4 beams of coherent light, and coherent imaging after passing through the polarizer Received by the CCD camera, that is to achieve synchronous phase-shift reception.

[0025] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0026] figure 1 and 2 A s...

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Abstract

The invention relates to a simultaneous polarization phase-shifting interferometer. The interferometer uses a HeNe laser as a linear polarization coherent light source and comprises reference light and measurement light carrying phase information of a standard lens and a lens to be measured. The reference light and the measurement light are reflected and transmitted by a polarization splitting prism respectively to be combined into one light beam in a same light path respectively, and a 1 / 4 wave plate and a beam splitter prism are arranged successively on the light path respectively; the light beam can be split into two portions with equal amplitudes by a depolarization splitting prism, and polarization splitting prisms are arranged on two split light paths; and image acquisition devices are arranged on the light paths after the light beams pass through the polarization splitting prisms respectively. According to the simultaneous polarization phase-shifting interferometer, the wave plate and polarization prism structures are used, and polarized light interference is used, so that four interference images with a phase difference of pi / 2 successively can be obtained at a same moment, effects of airflows and ambient vibration on measurement can be eliminated, the interferometer can be applied to field inspection of optical systems and optical inspection in complicated and severe environments, and continuous dynamic measurement can be achieved.

Description

technical field [0001] The invention relates to the technical field of optical interferometric instruments, in particular to a synchronous polarization phase-shifting interferometer. Background technique [0002] Phase-shift interferometry is a non-contact high-precision measurement method, which can achieve high-precision, real-time rapid testing, greatly expands the measurement function of the interferometer, improves the testing efficiency, and is widely used in the detection of the surface shape of optical components and optical The evaluation of system imaging quality has promoted the improvement of modern optical manufacturing level. The traditional phase-shift interferometry technology uses a piezoelectric ceramic motor to drive the standard mirror displacement, and uses the standard mirror displacement method at different times to obtain four sets of spatial phase-shift information (0°, 90°, 180°, 270°). In other words, by performing multiple acquisitions at differe...

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Application Information

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IPC IPC(8): G01B9/02
Inventor 艾华杨鹏曹艳波
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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