Self-measurement piezoelectric stack pump
A piezoelectric stack and pump cavity technology, which is applied to pumps, pumps with flexible working elements, liquid variable capacity machines, etc., can solve the problems of insufficient measurement accuracy and reliability, and achieve accurate measurement accuracy. high reliability, high reliability and simple structure
Inactive Publication Date: 2015-07-08
ZHEJIANG NORMAL UNIVERSITY
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Problems solved by technology
[0004] Aiming at the deficiencies in the accuracy and reliability of the measurement accuracy of the existing self-measuring piezoelectric pumps, the present invention proposes a piezoelectric pump that realizes output flow and pressure measurement based on valve opening detection, referred to as a self-measuring piezoelectric pump. stack pump
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[0018] The valve cover 2 is mounted on the pump cover 4 by screws, and the pump cover 4 is mounted on the pump body 10 by screws; the cantilever beam type outlet valve 1 and the inlet valve are bonded between the valve cover 2 and the pump cover 4 3. The outlet valve 1 is formed by bonding the piezoelectric film 1-1 and the substrate 1-2, and the inlet valve 3 is formed by bonding the piezoelectric film 3-1 and the substrate 3-2; in the pump cover 4 A pump chamber diaphragm 8 is crimped with the pump body 10. A piston 7 and a top block 9 are respectively installed on both sides of the pump chamber diaphragm 8 by screws; a piston 7 and a sealing ring 6 mounted on the piston 7 , The pump cover 4, the outlet valve 1 and the inlet valve 3 together constitute the pump chamber 5; the bolt 13 installed at the end of the pump body 10 presses the piezoelectric stack driver 11 on the top block 9 through the anti-torsion block 12 The piezoelectric stack driver 11, the outlet valve 1 and t...
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The invention relates to a self-measurement piezoelectric stack pump, belonging to the field of micro fluid transmission and control. A valve cover is installed on a pump cover, and the pump cover is installed on a pump body. A cantilever beam type outlet valve and a cantilever beam type inlet valve are stuck between the valve cover and the pump cover, and the outlet valve and the inlet valve are formed by sticking piezoelectric films and substrates. A pump cavity membrane is in pressure welding between the pump cover and the pump body, and a piston and an ejecting block are respectively installed at two sides of the pump cavity membrane. The piston, the pump cover, the outlet valve and the inlet valve together form a pump cavity, and a bolt presses a piezoelectric stack onto the ejecting block through a torsion-proof stop dog. The piezoelectric stack, the outlet valve and the inlet valve are respectively connected with an electrical control unit through a conductor group 1, a conductor group 2 and a conductor group 3. The self-measurement piezoelectric stack pump has the advantages that a one-way valve with a sensing function is utilized to directly measure the output pressure and flow of the piezoelectric pump, and an additional sensor is not needed, so that the structure is simple, and the accuracy and the reliability of the measuring precision are higher; and the self-measurement piezoelectric stack pump is suitable for real-time monitoring in the pumping process of different media such as liquid, gas, gas-liquid mixtures and the like.
Description
Technical field [0001] The invention belongs to a piezoelectric pump applied in the field of microfluid transmission control, and specifically relates to a self-measurement piezoelectric stack pump. Background technique [0002] Piezoelectric pumps have many advantages such as simple structure, small size, rapid response, no electromagnetic interference, easy operation, good flow and pressure controllability, etc., and are used in medical treatment, chemical analysis, fuel supply for automobile engines and fuel cells, and micro-electro-hydraulic systems. It has a wide range of application prospects, so its research and development have attracted wide attention from scholars all over the world. In order to meet the application requirements of different fields, people have proposed piezoelectric pumps with various forms and structures. Although the structure and performance of the proposed piezoelectric pumps are quite different, they are all driven by fluid by using the bending o...
Claims
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IPC IPC(8): F04B43/04
Inventor 阚君武王淑云张忠华温建明马继杰杨灿
Owner ZHEJIANG NORMAL UNIVERSITY