Piezoresistive pressure sensor with vibration compensation

A pressure sensor and vibration compensation technology, which is applied in the direction of instruments, measuring force, and measuring devices, can solve the problems of affecting measurement accuracy, instantaneous impact and damage of semiconductor resistance strain gauges, and achieve the goal of ensuring measurement accuracy, prolonging life, and reducing damage Effect

Inactive Publication Date: 2013-04-03
ANHUI AICS SCI & TECH GROUP
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Problems solved by technology

Under normal circumstances, this kind of pressure sensor can accurately measure the environmental pressure, but if the environment generates instantaneous vibration, it will ha

Method used

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  • Piezoresistive pressure sensor with vibration compensation

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Example Embodiment

[0015] Embodiment 1 of the present invention provides a piezoresistive pressure sensor with vibration compensation, such as figure 1 As shown, it includes: a Wheatstone bridge composed of four semiconductor resistance strain gauges 1, each of which is installed on the detection housing 10 through a buffer gasket 2. The output or input of the Wheatstone bridge An electrical signal filter 3 is connected to the terminal to filter out the burrs of the instantaneous voltage change caused by vibration, which can be an inductance capacitor filter. Wherein, the cushion gasket 2 can be circular, rectangular, oval or other shapes, and its material can be rubber.

[0016] The above are only preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited to this. Anyone familiar with the technical field within the technical scope disclosed by the present invention, according to the technical solution of the present invention The equi...

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Abstract

The invention discloses a piezoresistive pressure sensor with vibration compensation. The piezoresistive pressure sensor comprises a Wheatstone bridge consisting of four semiconductor resistance strain gauges, wherein an electric signal filter is connected between the Wheatstone bridge and a control circuit and is used for filtering burrs of an instant voltage change caused by vibration; and each semiconductor resistance strain gauge is arranged on a detection housing through a buffer gasket. According to the invention, the buffer gaskets are additionally arranged between the semiconductor resistance strain gauges and the detector housing, the damage of environment vibration to the detection housing is reduced; and the filter is additionally arranged in a measurement circuit, and the burrs of the instant voltage change caused by the vibration are filtered, thus the measurement precision is ensured, the semiconductor resistance strain gauges are protected, and the service life is prolonged.

Description

technical field [0001] The invention relates to a piezoresistive pressure sensor with vibration compensation. Background technique [0002] The traditional mechanical quantity pressure sensor is based on the deformation of the metal elastic body under force, from the elastic deformation of the mechanical quantity to the electric power conversion output, but the volume is large and the cost is high. Compared with traditional mechanical quantity sensors, MEMS pressure sensors are smaller in size, and the largest is no more than one centimeter. Compared with traditional "mechanical" manufacturing technologies, their cost performance is greatly improved. The current MEMS pressure sensors are mainly silicon piezoresistive pressure sensors, which use high-precision semiconductor resistance strain gauges to form a Wheatstone bridge as a force-to-electricity conversion measurement circuit, which has high measurement accuracy, low power consumption and extremely high precision. low ...

Claims

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Application Information

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IPC IPC(8): G01L1/22
Inventor 骆垠旭瞿庆广查德昌杨齐红王汉才
Owner ANHUI AICS SCI & TECH GROUP
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