Piezoresistive pressure sensor with vibration compensation

Abstract

The invention discloses a piezoresistive pressure sensor with vibration compensation. The piezoresistive pressure sensor comprises a Wheatstone bridge consisting of four semiconductor resistance strain gauges, wherein an electric signal filter is connected between the Wheatstone bridge and a control circuit and is used for filtering burrs of an instant voltage change caused by vibration; and each semiconductor resistance strain gauge is arranged on a detection housing through a buffer gasket. According to the invention, the buffer gaskets are additionally arranged between the semiconductor resistance strain gauges and the detector housing, the damage of environment vibration to the detection housing is reduced; and the filter is additionally arranged in a measurement circuit, and the burrs of the instant voltage change caused by the vibration are filtered, thus the measurement precision is ensured, the semiconductor resistance strain gauges are protected, and the service life is prolonged.

Description

technical field [0001] The invention relates to a piezoresistive pressure sensor with vibration compensation. Background technique [0002] The traditional mechanical quantity pressure sensor is based on the deformation of the metal elastic body under force, from the elastic deformation of the mechanical quantity to the electric power conversion output, but the volume is large and the cost is high. Compared with traditional mechanical quantity sensors, MEMS pressure sensors are smaller in size, and the largest is no more than one centimeter. Compared with traditional "mechanical" manufacturing technologies, their cost performance is greatly improved. The current MEMS pressure sensors are mainly silicon piezoresistive pressure sensors, which use high-precision semiconductor resistance strain gauges to form a Wheatstone bridge as a force-to-electricity conversion measurement circuit, which has high measurement accuracy, low power consumption and extremely high precision. low ...

AI Technical Summary

Problems solved by technology

Under normal circumstances, this kind of pressure sensor can accurately measure the environmental pressure, but if the environment generates instantaneous vibration, it will have an instantaneous impact on the semiconductor resistance strain gauge, resulting in damage and further affecting the measurement accuracy, which needs to be improved urgently

Images